Air Slide Table Series MXW

11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5 205.5 230.5 A 43.5 43.5 43.5 43.5 68.5 43.5 43.5 B 293.5 318.5 243.5 268.5 168.5 193.5 218.5 MXW20 W 23.5 23.5 23.5 23.5 48.5 23.5 23.5 V 313.5 338.5 263.5 288.5 188.5 213.5 238.5 A 44.5 44.5 44.5 44.5 44.5 44.5 86.5 74.5

MXW Series Long Stroke Slide Table

11 11 11 V 124 144 169 194 219 W V A 59.5 34.5 34.5 34.5 34.5 34.5 B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 8.5 W 39.5 14.5 14.5 14.5 14.5 14.5 V 155.5 180.5 205.5 230.5 225.5 280.5 A 68.5 43.5 43.5 43.5 43.5 43.5 43.5 B 168.5 193.5 218.5 243.5 268.5 293.5 318.5 MXW20 10 W 48.5 23.5 23.5 23.5 23.5 23.5 23.5 V 188.5 213.5 238.5 263.5 288.5 313.5 338.5 A 86.5 74.5 44.5

2/3 Port Valve for Various

Refer to pages 17-3-46 and 17-3-47 for specifications and models.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

ZR

Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Refrigerated Air Dryer

) F (mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block 148 81 60 50 36 C 133 73 B D A Power cable outlet (17) (Wire diameter 9 to 11) IDF100F to 150F (mm) Dimensions A B C D Model 25 IDFA22E, 37E IDFA55E, 75E 135 81 46 A Dimensions (mm) 207 81 50 36 B 509 Model A IDFA100F IDFA125F

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

DOC1020530

Trouble shooting . 46 9.1 Alarm and Warning . 46 9.3 Alarm Display . 46 -2- LECS Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Precautions 1

Y-020B Y-032B Y-040B Bore size 20 25, 32 40 +0.2 +0.1 9 20 25 36 46 M8 x 1.25 16 18 41 25 9 9 10 14 11 66 M8 x 1.25 +0.2 +0.1 25, 32 9 20 25 38 48 18 9 9 10 14 14 69 22 45 25 M10 x 1.25 M10 x 1.25 +0.3 +0.1 40 M14 x 1.5 12 24 55 68 22 12 13 25 13 92 16 24 50 49.7 49.7 M14 x 1.5 Applicable pin par no. Retaining ring Cotter pin size U1 R1 NX NZ Part no.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Modular Type Air Filters Series AF

If unit is to be used in a washdown application, avoid directing fluid into the exhaust port. 10 Accessories Spacer Dimensions mm Epoxy Coated Aluminum, Stainless Screws, NBR Seals Model A Y20-T4 Y30-T4 Y40-T4 10 11 14 F.R.L. center Interface With T Bracket Interface with T-type bracket T-type bracket Epoxy Coated Aluminum, Stainless Screws, NBR Seals G F.R.L.

Pilot Operated

Coil with a full-wave rectifier (electrical option R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Applicable flange Model M A B C D E F H J K L N 22.5 25.5 25.5 M N 43 46 46 M 89 N 61.5 64 64 Q 49.5 52 52 M N 95 98 98 Q 64 66.5 66.5 Normally closed VXD2272 VXD2382 VXD2392 Normally open VXD2270 VXD2380 VXD2390 32A 40A 50A 12 14 14 35 40 40 22.5 25 25 67.5 70

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5

Guide Cylinder Series MGG

(mm) Mounting Bore size 20-MGG Bearing type Stroke X Y Q Bore size (mm) Copper-free 39 86 (94) 25 32 Specifications 46 96 (105) 29 40 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 57 109 (121) 31 50 Double acting Action 56 112 (124) 34 63 Air 68 137 (151) 46 Fluid 80 Maximum operating pressure 1.0MPa 68 138 (152) 47 100 Minimum operating pressure 0.15MPa (horizontal with no load) Dimensions

VT317

46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor: VV317-02-1-02-A VQ 4-7 mounting hole P = 46 VKF VQZ VZ Manual override (Non-locking) VS DIN terminal facing upward 141.6 VFN Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 89 L2 = 46 x n + 59 2 181

Vacuum Regulator

plate thickness: Max. 4 R R 50 46 40 8 x 6.5 Rc 1/8 Pressure gauge port Pressure switch 103 5.2 (mm) Fitting Part Dimensions 66.4 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 22 20 6 1/4" 8, 5/16" 10, 3/8" 10.5 10.5 10.5 11 21 21 21 21 27.5 27.5 28.5 30.5 21 21.5 24 27 26.6 40.5 65 One-touch fitting 6 Vacuum Regulator Series IRV10/20 Dimensions/IRV20A: Single Sided Connections

Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

Air Cylinder Series CA2

M14 x 1.5 27 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 CS1 63 M10 x 1.25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 7 18 14 M18 x 1.5 31 80 M12 x 1.75 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 11 22 17 M22 x 1.5 37 CS2 100 M12 x 1.75 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 11 26 17 M26 x 1.5 40 Without rod boot With rod