5 Port Solenoid Valve

(12.5) 2(B) port 11 (12.5) 4(A) port Indicator light 50 59 73 106 165 179 2 Indicator light 2 4 90 24.6 38 48 11 (12.5) 4(A) port 11 (12.5) 2(B) port B A 14 12 1 5 3 4 2 Manual override 30 45 38 24.6 A B 2 x 5.6 Mounting hole 48 B A 14 12 5 3 1 45 30 2 x 5.6 Mounting hole Manual override 129 91.5 41.3 32 30.6 27 14.5 G1/2 78.8 41.3 32 30.6 27 14.5 Electrical entry PE X X PE R1 R2 15.5 P

KJ

Note) D: Max. diameter 7 8.4 12.7 15.3 13.2 15.2 13 M5 x 0.8 3.2 2.7 15.4 R 1 8 10 0.9 0.9 13.7 15.1 15.3 15.7 14.7 16.7 M3 x 0.5 M5 x 0.8 7 9.3 15.6 12.7 4 4.5 4.5 16.4 R 1 8 7 10 4.5 4.5 11 11 16.1 17.8 M5 x 0.8 13.5 17.4 11.6 6 18.5 R 1 8 10 2-applicable tubing T (With seal) 15-2-6 Miniature One-touch Fittings Series KJ Union Tee: KJT Applicable tubing O.D.

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

3-Position Rotary Table

x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9 5.5 M8 x

MRHQ

-0.2 8 0 -0.1 54h9 MHS 16.3 closed 0 -0.7 0 -0.05 M5 x 0.8 Finger closing port 10 4-M4 x 0.7 (attachment mounting screw ) MHC 5 20 MHT 24.5 9 Max. 9.2 4-M6 x 1 depth 9 (two on opposite side) 51 MHY M5 x 0.8 Finger opening port 3-R2.5 24 3.4 62 MHW MRHQ 16.5 27 19 26 9 39 36 Misc. 6.5 2-6.5 through 2-11 depth of counter bore 2.8 D8 46 101 10 Angle adjustment bolt 20+0.030 0 3-5H9 depth 6

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0 1 Grommet (G): VQZ2 2 (R)wGwC4, C6, M5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34mm2 24 22.7 Mounting holes 66.5 2-C4, C6, M5 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M3 X 0.5 External pilot port (Only external pilot style(R)) M5: M5 thread (C4, C6) (54.5) 16.6 25 10 30 (M5) 2.5 20 33.2

CNG

7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

-S INA-25-46 AN101-01 Series One-touch fitting KJSO4-M5 VQZ100 VQZ200 VQZ300 KQH06-M5 KQH06-01S KQH08-02S IN-457-32 (for 6) Screw KQH08-01S The diameter of the above fitting and silencer is the maximum diameter to in the EXH port.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

-46 AN101-01 Series One-touch fitting KJSO4-M5 KQH06-M5 KQH06-01S KQH08-02S VQZ100 VQZ200 VQZ300 IN-457-32(for 6) KQH08-01S The diameter of the above fitting and silencer is the maximum diameter for proper installation.

Rotary Actuator

17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42 29 10 20 4.5 1.5 7 10 0.5 20 13 36 M5 24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18) (10) M5 M5 0.005 0.020 0 0.052 63 45 15 30 6.5 4.5 9 20 1.5 31 20 56 M5 39.8 17 79.5 90 30 21 31.6 17.5 10 25 (16) (10) 10 Rotary Actuator Series CRB2 Vane

Rotary Actuator/Vane Style Series CRB2

) 4.5 (11) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 56 Series CRB2 Rotary Actuator Vane Style Dimensions: 10 Double vane type Following figures show the intermediate rotation position when A or B port is pressurized.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04D AS131F-U10/32-03D 4.7 10.8 5/32" 9.3 20.3 M5 x 0.8 8 9.6 9.3 0.7 27.4 4 9.3 20.3 10 31 4.7 0.7 37.4 10.8 10-32 UNF 8 9.6 9.3 31 AS131F-M5-06D AS131F-U10/32-05D 21.3 23.3 3/16" 11.4 16.5 20.6 13.5 21.4 6 11.6 31.8 34.5 11 AS231F-01-23SD AS131F-U10/32-07D 13.7 1/4" 12 21.6 20.7 24.4 3.2 8.4 21 31.9

E-P HYREG ® Series VY1

VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg)

Safety Speed Control Valve (SSC Valve) Series ASS

Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6 Flow Control Equipment Precautions Series ASN2 Handling of One-touch Fittings Caution Selection 1. Refer to page 15-1-11 for One-touch Fitting. Warning 1.

PSxx-OML0002CN

/ [UnL] [FAL] 3[LoC] -45No.PS-OML0002CN-G [0] <> (45)(45) [UnL] 5 [0] / 1 / ( ) 1 (/30 ) -46No.PS-OML0002CN-G , (1015 ) O -47No.PS-OML0002CN-G <> 5 UnLLoC 5 5 (30) 5 0 (30) 46/ 1 -48No.PS-OML0002CN-G ZSE30A(F)/ISE30A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -49No.PS-OML0002CN-G No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

VCB

15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27