0.4

(+) () 19 Station 10 (+) () 20 17 16 15 14 2 1 Plug terminal no.

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

Step Motor Controller

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Speed Controller with Indicator

28 AS331FS1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 21.5 16.2 49 AS331FS1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FS1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FS1-02-12 (S) 12 18.5 42.5 28.3 64.7 17 55 AS331FS1-03-06 (S) 6 11.2 12.9 16.6 20.2 36 21.4 57.8 13.3 1/4 19 63.1 61.7 57.9 56.5 24.5 19.2 41 AS331FS1-03-08 (S) 8 13.2 37.1

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Rotary Clamp Cylinders

76 G1/8 37 7.5 M10 x 1.5 M6 x 1.0 31.5 0.15 0.15 Rc1/8 9 depth 7 101.5 NPT1/8 0.1 0.2 0 0.062 61 12 52 40 5.5 14 16 5 3 6.5 14 24 30 7 69 17 70 G1/8 29.5 8 M10 x 1.5 M6 x 1.0 35 0.15 0.15 Rc1/8 9 depth 7 102.5 NPT1/8 0.1 0.2 0 0.062 73 15 64 50 6.6 19 20 7 3.5 7.5 17 30 37 8 86 22 81.5 G1/4 34 10.5 M12 x 1.75 M8 x 1.25 41 0.15 0.15 Rc1/4 11 depth 8 122 NPT1/4 0.1 0.2 0 0.062 86 15 77 60

REA/REB

8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 39 MVGQ J x E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32

Table of Contents

Dimensions . 5 5 5 5 6 7 9 9 10 12 15 17 23 23 24 24 25 29 34 37 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type

REA/REB

8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 39 MVGQ J x E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Cylinder with Lock Series MNB

Note 1) l (Drill through) Cotter pin d D m Dd9 L H B C 3 x 18l 4 x 25l 4 x 35l M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 21 26 31 39 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 36 51 72 4 4.5 5 3 4 4 44 60 82 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 -0.040 -0.076 -0.050 -0.093 -0.065 -0.117 Note 1) A cotter

MXS Series Air Slide Table

HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6-10 MXS6-20 MXS6-30 MXS6-40 MXS6-50 54 Air Slide Table MXS Series Dimensions MXS 6 With buffer (6) MXS6F 24 10 28 2-M3 x 0.5 thread 5 deep 22 0.5 19 Dimensions not indicated are the same

Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11

CJ2

16.5 15.5 16 17 17.5 21.5 28.5 29 20.5 27.5 28 29 29.5 35.5 40.5 41 34.5 39.5 40 41 41.5 71 70 71.5 89 88 87.5 47 46 47.5 D-A7 D-A80 101 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F 10 17.5 100 D-A7/A80 16 20.5 101.5 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL D-F7BAVL 10 23.5 D-A73C D-A80C 10 3.5 10 17.5 29.5 41.5 16 26.5 D-F7V/F7BAVL 10 16 10 16 10 16 20 23

TABLE OF CONTENTS

PORTS . (2) PLACES 1.00 (25.4) .30 (7.5) Standard valve porting is NPT. .56 (14.3) .20 (5.2) .41 (10.3) .30 Nominal Power: (7.5) Mtg.

CQS

44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 A + Stroke LS + Stroke CUJ Bore size (mm) L Y X LZ LY LX LT LH LG L1 LD CU 12 16 20 25 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46 34 38 48 52 2 2 3.2 3.2 17

Compact Cylinder

Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 51 52 53 57 44 45 45 49 12 12 16 16 16 16 20 20 46 52 64 74 8.5 9.5 10.5 14.5 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 59 67 82 96 2 3 2 3 14 14 17 17 7 7 8 8 32.5 38 46.5 56.5 5.5 5.5 6.6 6.6 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 9 9 10.5 10.5 14.5 14.5 13.5 15.5 11 11 15 15 5 5 5 5 1 1 1.6 1.6 15 17 17 17 32 40

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52