Table of Contents

47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Non-locking) 55.5 [62] 43.1 36.5 25.5 49 A A 19 9.5 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) A A 19 9.5 18.5 (Pitch) n-M5 X 0.8 P=16 16 (A port) [ ] for AC Other dimensions are the same as the M5.

KJ

1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 34.5 18.5 17.5 17 9.6 15.5 2.5 1 8 9.2 34 10 34 34.5 34.5 36.5 37 40 40 41 44 5 32 17.5 16 3 10.4 11.4 10.7 18.5 18 18.5 19.5 3 16 16.5 3.5 Applicable fitting size 1 4 13.2 17 4.6 5 16 14 18.5 6 19 21 7 3 8 17.9 Note) D: Max. diameter 22 Bulkhead Union: KQ2E Applicable tubing O.D.

Modular F.R.L. Unit

28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 105 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 105 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Modular F.R.L. Units

*16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

Modular F.R.L. Unit

0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position

Best Pneumatics Vol. 14

55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

66 50.5 75.5 41 66 27.5 27.5 16 25 25 116 116 25.5 100.5 91 50.5 75.5 41 66 50.5 75.5 41 66 30 30 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 101.5 92 51.5 76.5 42 67 51.5 76.5 42 67 33.5 33.5 17 126.5 126.5 40 40 119 119 31 106 94 56 81 44 69 56 81 44 69 38 38 19 131 131 20 20 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 27.5 27.5 17.5 25 25 27 102 92.5 52 77 42.5 67.5

VM

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

MGP

16 20 16 16 1 1 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 Stroke (mm) Stroke (mm) 17 l = 50mm V = 400mm/s 18 l =100mm V = 400mm/s 100 50 50 80 100 50, 63 80 50, 63 50, 63 40 50, 63 40 32 40 32 32, 40 32 10 10 25 25 5 5 Load weight m (kg) 20 20 25 16 20 16 25 20 16 1 1 16 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 25 Series MGP Compact Guide Cylinder With Air Cushion

Thermo-chiller

water temperature 90F (32C) 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 6 Facility water temperature 104F (40C) 6 Facility water temperature 104F (40C) 4 4 0 2 0 2 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] 11 Series HRS100

MY1

PP 12 17 18.5 QQ 16 16 24 VV 16 19 23 TT 14.5 16 20 WW 12.5 16 19.5 UU 15 16 22 XX 28 32 36 SS 6 4 10.5 RR 16 23 27 Model MY1H25G MY1H32G MY1H40G "P" indicates cylinder supply ports.