ML1

Model M1 M2 M3 W1 W2 W3 W4 ML1C25 14.7 4.90 4.90 20 12 3 10 ML1C32 29.4 9.80 9.80 32 19 5 16 ML1C40 58.8 19.6 19.6 50 30 8 25 Design Consideration ML1C/M1 Allowable moment and Max. payload Allowable moment and Max. payload varies depending on mounting orientation, piston speed etc. Therefore, use the cylinder within the range shown in the graph corresponding to operating conditions.

Mist Separator

Dimensions 31 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Micro Mist Separator

Dimensions 31 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Gripper Series MRHQ

Unit: g (oz) D-F9N (V) D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N Type 6 (0.21) 7 (0.25) 7 (0.25) 6 (0.21) 7 (0.25) 7 (0.25) Lead wire length 0.5m DC (+) Brown [Red] 31 (1.09) 37 (1.31) 37 (1.31) 31 (1.31) 37 (1.31) 37 (1.31) Lead wire length 3m Main switch circuit Auto Switch Dimensions (mm) OUT Black [White] 1in = 25.4mm D-F9N, D-F9P, D-F9B DC () Blue [Black] D-F9P (V) DC (+) Brown [Red] Main

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

MGQ

(Refer to page 8-31-1.)

Air cylinder

position, tighten the M3 mounting screw to secure the auto switch by making the bottom face of auto switch attached to the cylinder tube.

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nbe,ot so enords n :he case.t n red s I 19. use Lhe o.ror s,,m.o -K i \ : o$ Soleh hi' Lateral Plug in Style Manifold Series SVI 000/2000/3000/40W F r !

F/ISE

Do not attempt to insert or pull the pressure sensor or its connector when the power is on. 19 Series ZSE F/ISE Pressure Switch Precautions 1 Be sure to read before handling. Refer to pages 17 through 19 for safety instructions and pressure switch common precautions. 50 60 50 60 Handling Pressure Source Warning Warning 1. Use of toxic, corrosive or flammable gas.

Dedicated Controller

BIT 2 5 Program designation <1> BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)

Thermo-chiller/Rack Mount Type

-inch rack (EIA standards1). 1 19-inch Rack Standards Standard EIA (Electronic Industries Alliance) 500 mm Standard no.

Compact Guide Cylinder

(M3, M5 type only) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

HRL

Laser optical system Laser oscillator Optical system CH2 Oscillator CH1 Oscillator Optical system CH1 CH2 Cooling capacity [kW] 9, 19, 26 1 (Max. 1.5) Temperature stability [C] 0.1 0.5 Set temperature range [C] 15 to 25 20 to 40*1 *1 CH2 CH1 Space saving, Reduced wiring Dual thermo-chiller Thermo-chiller 1 unit 2 units Footprint 22% reduction To oscillator To optical system CH2 To optical

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Air cylinder

position, tighten the M3 mounting screw to secure the auto switch by making the bottom face of auto switch attached to the cylinder tube.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

x 0.5 28 32 8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x 0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

3

Specifications (Remote Sensor Unit) Refer to page 19 for monitor unit specifications.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

L3 394 432 413 451 470 ( ) L4 14.5 14 17.5 17 14 (L4) L3 G: Approx. 300 H: Approx. 600 lead wire length ( ) 2n1-Rc(PT) 1/4 (ports A,B) 73.7 <74.4> [75.3] 52.8 39.8 19 39.4 38.1 (5.4) A B A B A B B B B 1 P 28 28 1 R 20 35 60.7 <64.1> [62.3] 39.8 A A A DIN rail 43.1 51 [Rc(PT) 1/4 port] P = 19 22 32.5 (Voltage rating indication) (5.25) L2 (DIN rail mounting hole pitch 12.5) L1 2n2-One-touch