Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 03N (NPT3/8)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N11 (3/8" One-touch Fitting)

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 5/16" One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø10 One-touch Fitting, Mounting Method: -

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø8 One-touch Fitting, Mounting Method: -

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: 03T (NPTF3/8)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C12 (ø12 One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130 (3 Position

VFR

, C8 (A, B port) VZS D side VFS C6, C8 Light/Surge voltage suppressor (At FZ) VS4 Plug assembly: VVFS2000-30AOption: Refer to page 3-5-8.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

42

CU Note 2) Exhaust cleaner: U side exhaust K Note 3) Special wiring specifications (Except double wiring, 13 stations or more) N Note 4) Name plate SD Note 2) Direct exhaust with silencer box: D side exhaust SU Note 2) Direct exhaust with silencer box: U side exhaust W IP65 enclosure Stations Cylinder port 03 3 stations 0 U side mounting D D side mounting 18 18 stations C6 6 One-touch fitting

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

VZS

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken