Compact Guide Cylinder

Weights Slide BearingMGQM12 to 100 (kg) (mm) Model Standard stroke (mm) Bore size 10 20 25 30 40 50 75 100 125 150 175 200 12 MGQM12 0.23 0.27 0.31 0.34 0.38 0.48 0.58 16 MGQM16 0.34 0.39 0.45 0.50 0.55 0.68 0.80 20 MGQM20 0.54 0.61 0.69 0.76 0.94 1.09 1.24 1.39 1.54 1.69 25 MGQM25 0.83 0.93 1.04 1.13 1.44 1.68 1.92 2.16 2.40 2.64 32 MGQM32 1.51 1.91 2.29 2.69 3.09 3.49 3.89 4.29 40 MGQM40

Compact Proportional Solenoid Valve Series PVQ

PVQ30 (1.6) 120 Current decreasing 100 Current increasing Flow rate (l/min) 80 Curve A P = 0.7 MPa 60 Curve C P = 0.35 MPa Curve B P = 0.5 MPa 40 Curve D P = 0.2 MPa 20 0 0 24 VDC 20 40 60 80 100 120 140 160 180 200 12 VDC 0 40 80 120 160 200 240 280 320 360 400 Current (mA) 686 Compact Proportional Solenoid Valve Series PVQ Q. Required flow rate = 0 to 75 l/min.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Bore size (mm) 0.3 Operating direction 0.5 0.7 181 IN 302 422 32 241 OUT 402 563 Standard Stroke 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 IN 495 825 1150 32 1 50 OUT 589 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,

Soft Start-up Valve

characteristics C [dm3/(sbar)] 8.8 9.2 10.1 23.7 2(A)3(R) b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply to rapid air supply Needle flow characteristics at low speed air supply * Representative values Inlet pressure: 0.5MPa Pilot Pressure range (for Air operated type) -16- 4How to Order AV 20 00 02 B 1 D B A Symbol Description Body size 20 30 40

Information

Bore size Stroke range head cap screw for CW CT CL CX CD M CZ R CN mounting pivot bracket (Accessory) Without auto switch With auto switch CQ-C032 32 5 to 50 50 60 60 20 5 30 18 10 34 45 80 6.6 M6 x 12 L 75, 100 5 to 50 58.5 68.5 66.5 76.5 CQ-C040 40 68.5 22 6 32 18 10 40 52 80 6.6 M6 x 14 L 75, 100 10 to 50 CQ-C050 50 76.5 28 7 42 22 14 50 64 80 9 M8 x 16 L 75, 100 CQ2 10 to 50 74 84 CQ-C063

Ejector Valve Unit Series ZYY/ZYX 1

40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure

NCA1

5/8 7/16-20 3/8 3/4 1.43 CA2 200 (2) 3/4 1.06 0.3 2 1/2 1 0.62 0.62 1.26 3/8 3/8 5/16-24 4 3/4 9/16 2.4 1/2 3 5/8 1/2 1.71 3/4 5 1 1/8 2.6 .75 5/8 7/16-20 3/8 3/4 1.84 250 (2.5) 1 7/8 0.62 0.62 1.06 1.30 3/8 0 3/8 3 5/16-24 4 7/8 9/16 2.48 1/2 3 3/4 1/2 1.75 3/4 5 1 1/8 3.1 .75 5/8 7/16-20 3/8 3/4 2.19 CS1 325 (3.25) 1 3/8 0.87 1.05 1.57 5/8 1/2 3 3/4 3/8-24 5 53/64 7/8 2.72 5/8 4 1/4 3/

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

(N) Backlash Manual release 12 16 20 40 Head end only 8 5, 10, 15, 20, 25, 30 125 211 53 82 329 29 12, 16 25, 50, 75, 100 1 mm Non-lock type only 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 Strokes other than the above are produced upon receipt of order. Theoretical Output (N) Stud Bolt Part No.

LEC-OM069xx

Specifications of Built-in Resistor Regenerative Power Processed Applicable DRIVER Minimum Allowable LECYM2Resistance [] Resistance [] Capacity [W] by Built-in Resistor [W] * V5, V7, V8 40 Three-phase 200 V V9 50 40 8 40 *1: The average regenerative power that can be handled is 20% of the rated capacity of the regenerative resistor built into the DRIVER. 3-29 3 Wiring and Connection 3.7.1

NCA1

3/4 2.02 1 1/8 3/4 1/2 1/2 9/16 0.3 1/4-28 2 3/8 3/8 1.26 1.1 0.62 0.62 1 3/4 5 1.71 3 5/8 2.36 4 3/4 1.43 CA2 200 (2) 5/8 7/16-20 3/8 .75 3/4 2.6 1 1/8 3/4 1/2 1/2 2 1/2 9/16 0.3 5/16-24 3/8 1.06 3/8 1.26 0.62 3/4 0.62 1 5 1.71 3 5/8 2.4 4 3/4 1.84 250 (2.5) 5/8 7/16-20 3/8 .75 3/4 3.1 1 1/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 0.62 1 7/8 5 1.75 3 3/4 2.48 4 7/8 2.19 CS1

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

42

40 0.6 Outlet pressure [MPa] B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the valve.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Easily replaced filter element ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 7 7 12 16 19 22 22 30 40 62 20 20 30 75 100 3 16 1 4 1 4 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop. Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization.

Clamp Cylinder with Lock with Magnetic Field Resistant Auto Switch Rod Mounting ø 40, ø 50, ø 63 Series CLK2G/CLK2P CLK2G

(n = 3, 4, 5n) 40 50 63 40 mm 50 mm 63 mm A B 16.5 mm 19.5 mm 40, 50, 63 50, 63 S n Auto switch Port type Without auto switch, Without switch mounting rod Nil TN Rc NPT Nil Without auto switch, With switch mounting rod P Cylinder stroke Built-in Standard (Strong) Magnet Cylinder Part No. 50, 75, 100, 125, 150 With auto switch, With switch mounting rod Auto switch model None End bracket 1)

NCQ8

mA Load current 40 mA or less 0.8 V or less 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Red LED lights when ON.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5