Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

42

40 0.6 Outlet pressure [MPa] B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the valve.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Easily replaced filter element ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 7 7 12 16 19 22 22 30 40 62 20 20 30 75 100 3 16 1 4 1 4 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop. Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization.

Clamp Cylinder with Lock with Magnetic Field Resistant Auto Switch Rod Mounting ø 40, ø 50, ø 63 Series CLK2G/CLK2P CLK2G

(n = 3, 4, 5n) 40 50 63 40 mm 50 mm 63 mm A B 16.5 mm 19.5 mm 40, 50, 63 50, 63 S n Auto switch Port type Without auto switch, Without switch mounting rod Nil TN Rc NPT Nil Without auto switch, With switch mounting rod P Cylinder stroke Built-in Standard (Strong) Magnet Cylinder Part No. 50, 75, 100, 125, 150 With auto switch, With switch mounting rod Auto switch model None End bracket 1)

NCQ8

mA Load current 40 mA or less 0.8 V or less 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Red LED lights when ON.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5

IR1000/2000/3000

30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

q"s

E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)

Step Motor Driver （ Pulse input type ）

Basic parameter default Model LEHS10 LEHS20 LEHS32 LEHS40 Lead [mm] 255 / 76 235 / 56 235 / 40 235 / 40 Controller ID 1 1 1 1 IO pattern 1 1 1 1 Acceleration/ Deceleration pattern 1 1 1 1 S-motion ratio 0 0 0 0 Storoke (+) 1000.00 1000.00 1000.00 1000.00 Storoke (-) -1000.00 -1000.00 -1000.00 -1000.00 Maximum speed 70 80 100 120 Maximum acceleration / deceleration 2000 2000 2000 2000 Basic

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

Title not found

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

Air Cylinder CLA Series Fine Lock Model

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

Compact Manifold Regulator

PBT Material 30 40 0.5 g Weight 30 6.5 (R) 2 4.5 1 16 4 11 745 ARM10F Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.