SMC Corporation of America
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and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5 m Filtration / Mist separator 0.3 m Filtration efficiency 99.9 Oil mist density on the secondary side Max 1.0mg/m3 (ANR) (0.8ppm) Note3) Note4) 200 450 450 1100 1100 AC**C-B Rated flow Note 5) 150

operating pressure 100 psi (0.7MPa) High pressure type 113 psi (0.8MPa) Min. operating pressure 14 psi (0.1MPa) 21 psi (0.15MPa) Valve specifications Solenoid specifications Note 1) Note 1) Ambient and fluid temperature 14 to 122F 14 to 122F Max. operating frequency 20Hz 5Hz Proof pressure 217 psi (1.5MPa) Lubrication Not required Manual override Non-locking push type/Slotted locking type 150

siz~ ,t~ , ~8 , ' 0"32 jS4C ~ OQ . 50 150 "'2O or more:Special order ~ i ListO Pad DI. -Pad Type ~ Type 2 4 -' 6 8 10 1316 20 25 32 40 50 .

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

096 097 098 099 100 105 106 107 108 109 110 Guide pin diameter [mm] 7.5 7.6 7.7 7.8 7.9 8.0 8.5 8.6 8.7 8.8 8.9 9.0 9.5 9.6 9.7 9.8 9.9 10.0 10.5 10.6 10.7 10.8 10.9 11.0 Applicable hole diameter of workpiece [mm] For 8 For 9 For 10 For 11 Guide pin shape Round type Round type/Diamond type Symbol 115 116 117 118 119 120 125 126 127 128 129 130 135 136 137 138 139 140 145 146 147 148 149 150

/100 Bore) -F5PSDPC NCDA1 Tie Rod Mounting NBT-150 (1.5" Bore) NBT-200 (2" & 2.5" Bore) NBT-325 (3.25" & 4" Bore) "SC" auto switch CDQ2/NCDQ Direct Body Mount BQ-2 (32/40/50/63/80/100 Bore) Screw & Nut Kit included with cylinder "SC" auto switch CDRA1 Rail Mounting P294020-24 Screw & Nut Kit for 2 Auto Switches (50/63/80/100 Bore) -F7PSAPC -F7PSC CD85-A Rail Mounting BQ-1 (8/10/12/16/20/25

CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for mounting) 17 37.4

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

P2: Nozzle internal pressure P1: Atmospheric pressure Nozzle Diameter Flow Characteristics (Vacuum) Nozzle Diameter Flow Characteristics (Positive pressure) 5.0 5.0 0.6 0.5 4.5 4.5 4.0 4.0 0.4 3.5 3.5 0.6 Flow rate [l/min] Flow rate [l/min] 3.0 3.0 0.3 2.5 2.5 0.5 2.0 2.0 1.5 1.5 0.4 0.2 1.0 1.0 0.3 0.5 0.5 0.1 0.2 0.1 0.0 0.0 80 60 40 20 0 0 50 100 150 200 250 300 P2 [kPa] P2 [kPa] Example

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

A B C D E HRG-BP001 1/2 168 160 120 84 109 40 2 HRG-BP005 1/2 182 145 120 93 109 40 2 HRG-BP010 3/4 206 170 150 114 138 49 2.6 HRG-BP015 3/4 236 170 150 122 138 49 3.2 Note) The connection thread of the nipple comes with PTFE seal tape. 31 Series HRG Dimensions [Separate power transformer] Specifications Type Outlet voltage Volume Transformer part no.

1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation

NPT 3 4 1B 10 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Self-standing type AMF801/901 Piping Support type AMF800 to AMF1000 20 80 AMF 1 20 80 AMF 0 Body size Body size 80 90 80 90

230 32 15 240 80 284 483 13 568 355 300 3/4 485 15 7 9 Series IDF/IDU E Option Specifications 1 Refer to pages 2 and 5 for How to Order of options.

100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 222 Series MXY Air Slide Table Long Stroke Type Construction @3 y w q r u #0 MXH MXU !

175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08