PSxx-OMV0003CN

<> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -46No.PS-OMV0003CN-G [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000) /(59) [FAL] 3[nG] SET1 -47No.PS-OMV0003CN-G UP DOWN /(59 ) SET 1 () UP DOWN SET [F81] 30 -48No.PS-OMV0003CN-G [F90] <> UPDOWN[F90] SET UP DOWN [on] [oFF]() SET [oFF]() SET [F90] SET 50 UP DOWN SET2 -49No.PS-OMV0003CN-G

Coolant Valve

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

3

Add 10 g for conduit, 30 g for DIN terminal, and 60 g for conduit terminal type respectively. Note 3) Refer to Glossary of Terms on page 226 for details on the maximum operating pressure differential and the maximum system pressure.

Magnetic Separator FHM Series

20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using

IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

VCA

32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

Refrigerated Air Dryer

GD Breaker Capacity and Sensitivity Current Sensitivity current IDFB4E to 37E IDFB55E, 75E Model Breaker capacity 10 A 30 mA Maximum operating pressure: 240 psi (1.6 MPa) 10 A 30 mA Replacement Parts Configuration Replacement part no.

PFxx-OMO0007CN

mm PF2A721 PF2A751 -16No.PF-OMO0007CN FG PF2A7 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1 -17No.PF-OMO0007CN PF2A7 NPN2(2) PF2A7--27DC(+) OUT1 OUT2 DC1224V DC(-) Max.30 V80 mA 1 V PNP2(2) PF2A7--67DC(+) OUT1 OUT2 DC1224V DC(-) Max.80 mA 1.5 V -18No.PF-OMO0007CN 3OFF / 2 3 (21 ) (OUT1) (OUT2) (OUT1) (OUT2) (25 ) [F_1] [F_2] [F_3] (30 ) -19No.PF-OMO0007CN ( )OUT2 2 1 2z ON ( ) OFF

ASR

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Digital Flow Switches, Series PF2A, Series PF2W

Pin description 40 2-Port size 44.5 30 1 DC(+) 50 2 OUT2 3 DC() 4 OUT1 (41.5) 73 Flow direction 6 Series PF2A to are terminal numbers.

T

Do not repair or patch the replaced tubing or fittings for reuse. 15-6-30

Pressure Gauge Guide

Micro-switch Rated Voltage AL Load resistant 30 VDC 125 VAC 250 VAC 0.01 to 0.5 A 0.01 to 0.3 A 0.01 to 0.2 A Rated voltage Load Operating current range How to Order GP46 10 01 M C L2 X201 Option Pressure gauge with switch Nil X201 Lead wire length 3 m Symbol Specifications Option Size Nil M With M5 (Female thread) Symbol Specifications Note 1) X3 (Wetted parts stainless steel) specification

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Size Suction flow rate L/min (ANR) 20 25/32/40 Bore size (mm) Item 20/25/32/40 1 2 1.5 MPa 1.0 MPa 0.2 MPa 10C to 60C (With no freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion 50 to 400 mm/s Air cushion Stroke length tolerance +1.0 0 Up to 250

Clean Gas Filter

Part No.: SFB100-02X8 002 Part No.: SFB200-02-S -X40 V Specifications Fluid Air Nominal filtration Operating pressure Max. 0.99 MPa Nominal filtration m Note 1) Rated flow rate L/min (ANR) Note 2) Symbol 001 002 005 010 020 040 070 100 Max. operating temperature 80C O-ring 1 2 5 10 20 40 70 100 5 10 15 30 50 80 130 250 Element proof differential pressure Symbol N V T Material NBR FKM PTFE

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.