SFOD-OMT0010 Axis 3 ABS 50 50.00 1000 1000 0 0 0 0.5 Axis 4 ABS 50 50.00 1000 1000 0 0 0 0.5 Movement (ex.)
100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250
SJ3000-50-1A-ll SJ3000-50-1AS-ll SJ3000-50-1AR-ll X, PE port: Metric size 4 Inch size 5/32" Internal pilot (Metric size) C6: With 6 one-touch fitting (straight) C8: With 8 one-touch fitting (straight) L6: With 6 one-touch fitting (elbow upward entry) L8: With 8 one-touch fitting (elbow upward entry) B6: With 6 one-touch fitting (elbow downward entry) B8: With 8 one-touch fitting (elbow downward
27.5 0 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-B 1/8 167.4 115.1 30.7 30 55.1 50 29.4 3.5 41 57.2 35 7 14 4 41 AC40C-B 1/8 220.4 147.1 35.8 38.4 72.6 75 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-B 1/8 235.4 149.1 35.8 38.4 77.6 75 33.8 3 50 80.2 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round
, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101 Front matter 2 Electric Actuators RotaryTable Step Motor (Servo/24 VDC) Miniature Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke Stroke Size
Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70
20 82 36 36 41 20 74 65 90 50 20 8-8-27
X+50 X+25 X Display (25 to 0) 25 (100 to 76) (75 to 51) (50 to 26) value ISA3-H X+150 X+100 X+50 X (50 to 0) 50 (200 to 151) (150 to 101) (100 to 51) ISA3-F ISA3-G X+750 Process X+500 X+250 X (250 to 0) 250 (1000 to 751) (750 to 501) (500 to 251) data ISA3-H : The value in the brackets in level 2 shows the boundary value. -66No.PS-OMW0009-C 4 How to use X: Switch point is divided by weight
Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is a registered trademark of Haynes International.
] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series IDFBE Optional Specifications 1 Refer to How to Order pages 90 and 94 for optional models.
15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10
/60Hz) 200 to 230VAC (50/60Hz) 3-phase 200 to 230VAC (50/60Hz) option Analog monitor output Regenerative option PC LEC-MR-RBRS-422 interface When using this software, order USB cable separately.
/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.
Refer to back page 50 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions.
N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve option ** With relief valve option
100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min (ANR
(n = 3, 4, 5n) 40 50 63 40 mm 50 mm 63 mm A B 16.5 mm 19.5 mm 40, 50, 63 50, 63 S n Auto switch Port type Without auto switch, Without switch mounting rod Nil TN Rc NPT Nil Without auto switch, With switch mounting rod P Cylinder stroke Built-in Standard (Strong) Magnet Cylinder Part No. 50, 75, 100, 125, 150 With auto switch, With switch mounting rod Auto switch model None End bracket 1)
Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 points Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps
Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70
Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70