Digital Flow Switch

Reduced panel fitting labor Space saving Mounting example Bracket B Mounting example 4 Flow Switch Flow Rate Variations Rated flow range [L/min] Smallest settable increment Series Detection method Applicable fluid Availability of the digital flow monitor PFG300 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 Thermal type (Thermistor

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

Clean Gas Filter

(Refer to page 300.)

0.01

SFD100/200 AMG SFD200 only Rc 1/4 NPT 1/4 G 1/4 AFF Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.

Air Slide Table Series MXP

/Mymax Stroke (mm) Model Stroke (mm) 0.2 5 10 15 20 25 30 10 15 20 25 30 5 MXPJ6 2.6 3.5 2.3 1.4 50 100 200 300 500 700 MXP 6 Average speed Va (mm/s) Collision speed V (mm/s) MXP 8 2.6 5.6 1.4 5.7 MXP10 4.2 8.5 1.7 6.3 Note) Use the average speed when calculating static moment.

SMC Pneumatic Clean Series

1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate l/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300 Guide pin diameter 1268 Pin Clamp Cylinder Series CKQ D/CLKQ D G P G P Table 2.

Compact manifold regulator ARM5 Series

0 50 100 150 200 SRF Flow rate L/min (ANR) Flow rate L/min (ANR) ITV ARM5BA-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa ARM5BA-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa 0.7 0.35 IC 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) ITVH 0.5 0.25 0.4 0.20 ITVX 0.3 0.15 PVQ 0.2 0.10 0.1 VY1 0.05 0 0 50 100 200 250 150 300 0 0 50 100 200

7ND9071en

Disconnect and remove all cabling which enters the limit switch housing (300). Remove screws (325), 3 pcs. and lift out the limit switch base plate (324) complete with switches, LUI and connector block. Open screw (326) and turn the limit switch housing (300) from the positioner housing. Remove the electronics cover (39). Proceed with the valve controller as applicable.

0.4

Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.

IZx-OMX0087

200 300 300 5m/s 2m/s 2m/s 400 400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

60

Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure (P2) MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VXK211l 2 50 100 150 200 250 300 350 VXK2l2l 3 100 200 300 400 500 600 VXK2l3l 4.5 200 400 600 800 1,000 1,200 VXK2 4l 3 2 6 500 1,000 1,250 3 2 VXK2 5l 8 500 700 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure

Digital Gap Checker

m 400 1 m 350 Displayed value 300 5 m 250 200 150 100 50 0 0.5 0.4 0.3 0.2 0.1 0 Actual distance [mm] Nozzle Shape Internal Circuit and Wiring Example ISA3-N NPN (1 output) The nozzle shape must be similar to Fig. 1.

HRX-OM-I051

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L

Air Slide Table Series MXJ

dynamic moment Mea Nm 1.5 Allowable static moment Ma Nm 0.05 MXJ4,MXJ6 MXJ4,MXJ6 0.6 0.5 1 0.00 0.9 0.8 0.7 0.6 Collision speed V mm/s (Average speed x 1.4) 0 200 100 300 400 500 600 700 0.4 MXJ8 0.3 0.5 0.35 Rubber stopper 0.4 0.30 0.2 Load mass W kg Metal stopper 0.25 0.3 0.20 0.15 0.2 100 50 200 300 0.1 100 50 200 300 400 500 Average speed Va mm/s 0.10 500 700 Average speed Va mm/s Collision

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.