90

to 60C (No freezing) Weight (kg) Note 5) 0.13 0.23 0.47 Note 4) 5 to 50C for the products with the digital pressure switch Note 5) Without accessories Note 1) When there is no flow rate on the outlet.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

IC circuit 5 V, 12 V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes Relay, PLC 24 V Grommet A93V2 A93 A90 100 V 2-wire No

Low Maintenance Filter Series FN1/FN4

Max. 1.0 MPa Fluid temperature Max. 80C 40 l/min 80 l/min 250 l/min Flow rate Note) Rc1 (IN, OUT, DRAIN) Rc2 Port size Element Lock Bowl and Cover: Stainless steel 304, O-ring: NBR/FKM Material Stainless steel 304 Material Step type Step type Construction Cylindrical type Cylindrical type Cylindrical type 5 m, 20 m 5 m, 20 m 5 m, 20 m 5 m 5 m Nominal filtration rating 0.6 MPa Differential

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

NPN) Reed switch Solid state switch Z76 5 V IC Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Relay, PLC 100 V, 200 V 2-wire 24 V Diagnostic indication (2-color) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC Grommet 100 V, 200 V 12 V 2-wire 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire 24 V Water

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Micromesh element equipped Note) Click here for details 3 4 5 6 3.5 MPa 7 MPa 14 MPa 21 MPa Nominal filtration Differential pressure indication Fluid direction 005 010 020 5 m 10 m 20 m 0 1 2 4 5 None Nil IN left IN right Differential pressure indicator Construction/Connection L Differential pressure indication switch Note) Note) The paper elements for water-glycol or emulsion is 10 m only

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

40 131 141.5 196 25 34.5 89 128 169 196 20 21 62 89 153 46 149 42 50 50 144.5 156 199 25 29.5 41 84 131 152 172 199 20 16 37 57 84 63 63 Note) Intermediate strokes other than standard strokes are produced by installing spacers. 5

Large blow and

band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

Siiiil"Tivrc

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

MXW

Yes 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Yes 24 V Grommet A93V A90V A93 A90 100 V Relay, PLC 12 V 2-wire No IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

(PNP) 2-wire IC circuit 5 V,12 V Reed switch Solid state switch 12 V Yes Grommet Diagnostic indication (2-color indication) IC circuit 5 V,12 V Relay, PLC 24 V 12 V Water resistant (2-color indication) IC circuit 5 V,12 V 12 V 3-wire (NPN equiv.)

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

$ $ G59 G5P K59 G39 K39 G59W G5PW K59W G5BA 3-wire (NPN) IC circuit 5 V, 12 V 24 V 3-wire (PNP) Grommet 12 V 2-wire 100 V, 200 V Solid state auto switch Reed auto switch 3-wire (NPN) 2-wire Terminal conduit 12 V 3-wire (NPN) IC circuit Yes Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 12 V 2-wire 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V M9PA

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

A96V IC circuit Reed switch 5 V A96 Yes Grommet 2-wire IC circuit Relay, PLC A90V A93V A90 A93 100 V 5 V, 12 V 12 V 24 V No Yes *Solid state switches marked with a symbol are produced upon receipt of order. *39 in (1 m: M): Available in the D-M9W(V) only. *Lead wire length symbols: 20in (0.5 m) Nil (Example) M9NW 39in (1 m) M M9NWM 118in (3 m) L M9NWL 197in (5 m) Z M9NWZ 1

Ambient Dryer Series AMG

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Series 12-REA Sine rodless cylinder

Rodless cylinder Adjusting screw width across flats Lock nut A tightening torque Model Model Width across flats (mm) Tightening torque (Nm) 12-REA25 12-REA25 5 1.2 12-REA32 12-REA32 5 1.2 4. When used for vertical operation, use caution regarding allowable load.

FC2W-X110

Turn power off and then on again. 1.6 Over current 500 ms 500 ms 0 1.0 5.0 1.3 1.2 Input signal Voltage [V] Flashing: Two ashing cycles of 250 ms at two-second intervals Error automatically resets when the supply ow rate is recovered (LED goes off). Insufcient supply ow rate Flow rate control Position control (Fully closed) 250 ms 250 ms 2000 ms 1 A

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Adjusting screw width across flats Lock nut A tightening torque Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Width across flats (mm) 5 5 6 8 8 Model 12-REA25 12-REA32 12-REA40 12-REA50 12-REA63 Tightening torque (Nm) 1.2 1.2 2.1 3.4 3.4 5. Do not scratch or gouge the external surface of the cylinder.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

After installation, perform a leak test. 5 Process Gas Equipment Common Precautions 2 Be sure to read before handling. Maintenance Export Warning Warning 1. Perform a routine maintenance. Perform a routine maintenance at customers responsibility by taking into consideration the operating conditions of the equipment.

42

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1