Intrinsically Safe Valve

fluid temperature 2-position single, double 4-position dual 3 port valve 5 Max. operating frequency (Hz) 3-position 3 Non-locking push type, Push-turn locking slotted type, Push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Main/Pilot valve common exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 150

EXxx-OMY0006CN

Table 4-1 EX245 24 V DC +20% -15% 1ms IP65 () (IEC60529) 10M -FE 500VAC IEC61131-2 500VAC1 -FE IEC61131-2 -10 to 50 -20 to 60 35%85% RH 80 kPa 108 kPa ( 2000 m ) 66 kPa 108 kPa ( 3500 m ) 10 Hz to 57 Hz 0.75 mm 57 Hz to 150 Hz 49 m/s 2 XYZ 2 XYZ 3 EN 60068-2-27/29 EMC , 2014/30/EU, IEC61326-3-1 , 2006/42/EC, EN 62061, EN ISO 13849 TUV , EN 61508, EN 62061, EN ISO 13849

HRX-OM-X084

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

XL-OMY0001

/ AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

VP3145/3165/3185

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

page 60.) 25 or less Max. operating frequency (Hz) 5 Non-locking push type, push-turn locking slotted type, push-turn locking lever type Manual override (Manual operation) Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Pilot exhaust method Body ported Lubrication Mounting orientation Shock/Vibration resistance (m/s2) Note 2) Not required Unrestricted 150

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

As a rule, it should be turned about 90 past the point at which tightening can be felt. 12 Series MGZ Reed Switch Internal Circuits Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Electric Actuators

0.02 Ground ball screw Corporation 1000 Yaskawa Electric 100W 0.05 Rolled ball screw Corporation Features 1 Simplified Selection Flow Chart Series LJ1/LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90

5 Port Solenoid Valve Series SQ1000/2000

107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198 9 159 176.5 200 210.5 10 170.5 188 212.5 223 11 182 199.5 225 235.5 12 193.5 211 237.5 248 13 205 222.5 250 260.5 14 216.5 234 262.5 273 15 228 245.5 275 285.5 16 239.5 257 287.5 298 L1 L2 L3 L4 21 5 Port Solenoid Valve Series SQ1000/2000 SQ2000/Flat Cable Kit Stations

3 Port Air Operated Valve Series SYJA300

Not required Unrestricted 150/30 Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation. Note 2) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

AP10PA

24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less How to Order Port Number q w e r AP10 S FV4 FV4 PA 2PW Option Delivery pressure Specification Standard (Cv:0.09) High flow (Cv:0.15) 6) Code Delivery pressure 7 to 150

VCW

D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

While down, turn clockwise by 90 to lock it. Turn it counterclockwise to release it. Circuit for DC Circuit for AC Light A () A (+) SOL SOL C(+) Light () C ZNR Locking style(Slotted) VQZ100 Due to the use of non-polar light, the VQZ series has no polarity. Refer to p.1.12-26 for the latching style.

Speed Controller: Standard Type Large Flow In-line Type AS Series

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min. L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 655

BP1000

psig (0.6 MPa) 90 psig (0.6 MPa) 180 psig (1.2 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 450 psig (3.15 MPa) 900 psig (6.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.3 1 x 10-10 Pam3/sec NPT female, Compression Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.65 lbs (1.2 kg) 2) 1) 22 to 160F (30 to 71C) for Teflon seat.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Set the regulating pressure range for the outlet pressure of the regulator in a range that is 90% or less of the inlet pressure. If set to above 90%, the outlet pressure will be easily affected by fluctuations in the flow rate and inlet pressure, and become unstable. 5.