Table of Contents

(TPH0806, TPH1075, TPH1209) 20 0 0 20 40 60 80 Operating temperature (C) 15-6-22 1 Clean Tubing: Soft Polyolefin Tubing Series TPS Model/Specifications 20 m bundle 100 m roll K TPS0425 Model TPS0604 TPS0805 TPS1065 TPS1208 O.D.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire containment groove 8-15-80

Non-contact Gripper

Type] Size: 20 Size: 40, 60, 80, 100 A A A A-A r q e w A A-A e r q w Component Parts No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Igm: Leakage current of the servo motor (Found from table 11.2.) 120 Leakage current [mA] 100 80 60 40 20 0 2 5.5 14 38100 3.5 8 22 60150 30 80 Cable size [mm ] 2 Fig. 11.7 Example of leakage current per km (lg1, lg2) for CV cable run in metal conduit 11 30 11.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

1.0 1.2 1.4 1.6 1.8 2.0 400 MB 50 10% 30% 70% 300 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 50% AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 AS3201F -03-10 200 100 0 SV300 ANA1 -C12 T1075 400 MB 80 300 AS4000-03 200 100 0 400 MB 100 300 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

CY1

, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

Compact Cylinder

Compact Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS New New Both ends tapped mounting added. Bore sizes 80, 100 added. Port thread types NPT, G added.

SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

CQS

Thus, it can be used in a Class 100 clean room.

CJ2

B C d H NTJ-015A 10 16 NTJ-010A 8.1 9.2 M4 x 0.7 M5 x 0.8 3.2 4 7 8 Symbol S Z ZZ Stroke Bore size (mm) 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92 104 116 95.5 103 115 127 48.5 57

Large Size Vacuum Module: Series ZR

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

Compact Rotary Actuator Series CRQ2

mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement CRB2 MSQXB10A MSQXB20A CRBU2 CRB1 MSU 300 CRJ 400 CRA1 Displacement (m) Displacement (m) CRQ2 MSQ 250 MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20

3

80 100 Fluid temperature [oC] Fluid temperature [oC] PF3W711/511 PF3W721/521 1.2 1.6 Operating pressure/ Proof pressure [MPa] 1.4 1.0 Proof pressure [MPa] 1.2 Pressure [MPa] Pressure [MPa] 0.8 1 0.6 0.8 Operating pressure [MPa] 0.6 0.4 0.4 0.2 0.2 3-Color Display Digital Flow Monitor for Water 0 0 0 90 100 80 70 60 50 40 30 20 10 0 90 100 80 70 60 50 40 30 20 10 Fluid temperature [oC] Fluid

Vacuum Ejector Series ZM

, Standard Supply Pressure: S 0.45 MPa ZL ZM13S ZY Exhaust Characteristics Flow Characteristics ZF 90 180 90 80 160 80 ZP Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 140 70 SP 60 120 60 Air consumption ZCUK 50 100 50 40 40 80 AMJ 30 30 60 AMV 20 20 40 Suction flow rate 10 10 20 AEP 0 0 0 0 25 35 40 30 15 20 10 5

ITV

Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR

MHL2

182 200 150 198 242 188 246 286 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

MHL2

0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) 2.2-3 Wide Opening Air Gripper Series MHL2 Example

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Air-hydro Unit

40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL