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Set range is AL.01 to AL.51. to Contact output 2 function Setting and checking 25. Press the [SEL] key once. The set screen of contact output 2 function is displayed on the digital display. PV SV HRS090 Series 2.4 Setting and checking 2-11 HRX-OM-T004 Chapter 2 Contact input/output communication 26.

Set range is AL.01 to AL.48. Contact output 2 function Setting and checking 25. Press the [SEL] key once. The set screen of contact output 2 function is displayed on the digital display. PV SV HRSH Series 2.4 Setting and checking 2-11 HRX-OM-R028 Chapter 2 Contact input/output communication 26.

With Differential Pressure Gauge (GD40-2-01) 2. With IN-OUT Flange A differential pressure gauge that keeps track of the filter life is installed on the filter itself. This facilitates piping and achieves a compact design. Makes flange piping easier.

2 4 T 5 1 3 SQ 16 16 13 A 40 53 66 53 66 B A VQ5000 VQ0 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 VQ4 3-Rc 1/2 (P), 4 (A), 2 (B) port VQ5 Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position

2 2 2 2 2 2 4 4 M2 x 0.4 x 23 M2 x 0.4 x 48 M2 x 0.4 x 53 M2.5 x 0.45 x 41 M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 w Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

-01-34B Twist selector (2 position) VM-34CG Green VZM550-01-34G VM-34CY Yellow VZM550-01-34Y VM-36C Key selector (2 position) VZM550-01-36 Black Push-pull VZM550-01-37 Note 1) Actuator replacement is available for all types.

Model VHS4510 VHS4510-06 VHS5510 1 (P) 2 (A) 3/4 1 1/4 3/8 1/2 3/4 Port size 1/2 1/2 3/8 3 (R) 77 1 (P) 2 (A) 27 82 125 38 55 Effective area (mm2) Push the handle and then turn. Double action construction prevents erroneous operation. 49 2 (A) 3 (R) 36 42 40 50 53 0.77 0.42 Mass (kg) 0.36 Combination with modular type FRL is possible.

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

HOW TO ORDER AR 30 03 BG B K 1 4 5 6 3 2 1 1 1 1 Symbol Description Body size 20 25 30 40 50 60 Reverse flow function K With reverse flow function 2 2 2 2 Nil Rc N NPT F G Thread type 3 3 3 3 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 4 4 4 4 Port size Nil Without mounting option B With bracket H With set nut for panel mounting a Mounting Option Nil Without pressure gauge E Square embedding

Body Ported RoHS How to Order Valve VF 3 1 3 0 5 G 1 01 Body ported Series 1 3 5 Bracket VF1000 VF3000 VF5000 Type of actuation Nil F Without bracket With bracket Thread type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center Rc G NPT NPTF Nil F N T VF1000/3000 Single type (The bracket cannot be connected after delivered

m 200 200 500mm or less 600mm stroke or less 150 150 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] -10- 2.2 How to Order LEL 25 T 300 S 1 6N 1 Size I/O cable length[m]*, 6 ,1 ,2 Actuator cable type 25 Nil Without cable 1 1.5 3 3 Bearing type *1The standard cable should be used on fixed parts. 5 5 M Sliding bearing L Ball bushing bearing For using on moving parts,

Gasket for sub-plate VP 00 2 3 P 1 M3 x 0.5 x 32 VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Tightening Torque for

(at 80 mA load current) Response time 2 1 s/2 s Output protection Short circuit protection Output mode Flow Select one of the output (hysteresis or window comparator mode), the output for the accumulated flow and the accumulated pulse output. T emp. Select the output for fluid temperature (hysteresis or window comparator mode).

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Note 2) Analog output has no overcurrent detection function.