ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Hygienic Design Cylinder/Basic Type

2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !2 !3 !2 !3 !2 !3 63 !2 !3 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series HYQ. 63 63 63 Seal Kit List Description Material Note No. Seal Kit List Description Material Note No. o !0 11 o !0 11 Rod seal Rod seal (FKM can be selected.) (FKM can be selected.)

05-hyq-e

2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !1 o !4 !2 !0 !3 !2 !3 !2 !3 !2 !3 63 !2 !3 The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series HYQ. 63 63 63 Seal Kit List Description Material Note No. Seal Kit List Description Material Note No. o !0 11 o !0 11 Rod seal Rod seal (FKM can be selected.) (FKM can be selected.)

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

FGX-OM-N027

Maintenance 8 1-1) Element replacement 8 1-2) How to replace element 8 2-1) Replacement of seals 10 2-2) How to replace holder assembly 10 3 / 13 FGX-OM-N027-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Compact Guide Cylinder Series MGQ

74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16 20 25 22 56 2 5 36 40 5 50 M4 x 0.7 7 12 25 62 38 42 7 54 M5 x 0.8 8 13 2.5 5.5 30 72 46 52 10 64 M5 x 0.8 8 13 2 4 38 86 56 62 10 76 M6 x 1.0 9 14 2 2 MGQM (Slide

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

LC6D Connector Cable LC6C Power Connector Cable Model LC6-1-C1--X258 Model LC6-1-C2--X252 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17 18 Interface cable 7 9 8 Power cable

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

NCM

= 2, 4, 6...) 0.6 3.1 3.1 + 2 (n 2) (n = 2, 4, 6...) 0.4 D-H7C D-C73C D-C80C 0.6 + 2 (n 2) 2 (n = 2, 4, 6...) 0.6 2.8 2.8 + 2 (n 2) (n = 2, 4, 6...) 0.4 D-G5NTL 0.6 + 2 (n 2) 2 (n = 2, 4, 6...) 0.6 2.7 2.7 + 2.2 (n 2) (n = 2, 4, 6...) 0.4 D-B5 D-B64 0.8 + 2 (n 2) 2 (n = 2, 4, 6...) 0.8 2.9 2.9 + 2.2 (n 2) (n = 2, 4, 6...) 0.6 D-B59W Note 1) D-G5NTL, B5, B64, B59W cannot be mounted

Fieldbus system EtherNet/IP compatible SI Unit

Data[13] Port 4 type -126No.EX-OMZ0024 2-1.

VQ5000

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted 6 Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

30

Note 2) Value of FEP tube. 13 Series KQB2 Applicable Tube: Inch Size, Connection Thread: UNF, NPT Dimensions Female Connector: KQB2F Note 2) Effective area (mm2) Applicable tube O.D.

High-Precision Digital Pressure Switch

8 Set Pressure Range and Rated Pressure Range p. 13 Functions p. 13 Internal Circuits and Wiring Examples p. 13 Dimensions p. 15 How to Order p. 9 Specifications p. 10 Set Pressure Range and Rated Pressure Range p. 13 Functions p. 13 Internal Circuits and Wiring Examples p. 14 Dimensions p. 15 5 High-Precision Digital Pressure Switch ZSE20m(F)/ISE20m Series 3-Screen Display IP65 2 outputs

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

LEY-OM007

/P.41 7.2 1 INP ON INP ON 3 1 INP ON OFF ON BUSY OFF ON OFF 1 2 1 0.5 INP INP 2), () /P28 4 INPOFF INP OFF 1INP BUSYOFF 4 2 /P.47 7.5 5 1 6 1 /P.9 2.1 /LEY /P.13 3.1 /LEYG -53- No. 1 / EMG SVREOFF 2 /CN1 BK RLS DC24V(+) /P.40 6.6 7 /P.9 2.1 /LEY /P.13 3.1 /LEYG , EMG SYREOFF 2 /CN1 BK RLS DC24V(+) 1 , BK RLS DC24V(+) /P.40 6.6 -54- No.LEY-OM00102