Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Indicator window direction Elbow Universal Note 1) For selecting applicable tubing O.D., refer to the Model on page 687. Note 2) Use 1/8" tubing. Note 3) Only the metric size is available for the G thread type.

AIR COMBINATION

149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 1 1 AC60-B 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round

Compact Hydraulic Cylinder

Auto switch mounting screws 1 D-A7/A8 D-F7/J7 BBA2 Auto switch mounting nuts (square nut) 2 M3 x 0.5 1 BQ-1 Auto switch mounting nuts (convex) 3 M3 x 0.5 1 BQ-2 Spacers (black resin) for BQ-2 are not included.

PC Wiring System Series PCW

5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1

CQS

3.5 3.5 22.5 10 7.5 2.5 10 7.5 24.5 25 7 7 3.5 (1) 5.5 5.5 24.5 11 9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

MHZ2/MHZJ2

Guide for internal needle adjustment Number of turns from needle fully closed Note 1) Model MHZ2-10D-X46 MHZ2-16D-X46 MHZ2-20D-X46 MHZ2-25D-X46 1/4 to 1/2 1/2 to 1 1 to 11/2 11/2 to 2 Note 1) The needle is tightened gently until it stops. 31 Order Made Specifications Series MHZ2/MHZJ2 3 MHQ2/MHQG2 Compatible Flat Finger Type X51 The flat finger type can be selected depending on the intended

PF-OMM0004_C

) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2 Nm (81 ) (4 ) -18No.PF-OMM0004-D () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm PVC PVC PVC PVC -19No.PF-OMM0004-D

XM, XY

x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Main exhaust valve 14 45 80 160 200 Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperatures, excluding gas permeation (Standard

Guide Cylinder/Compact Type Series MGC

160 176 110 125 9 9 88 165 M8 37 160 1/8 86.5 30 62 4 142 19 19 190 210 115 135 11 12 96 200 42 194 1/8 95 35 67 4 M10 GL GQ GR I J K L M N O P Note 2) Q R S T U V W Bore size (mm) 20 25 32 40 5.5 4 4 35 60 80 105 50 25 M6 x 1 M5 x 0.8 94 12 26 16 112 53 50 9 7 7 40 70 95 125 60 32 M5 x 0.8 104 12 31 20 132 63 60 M8 x 1.25 9 7 7 40 70 95 125 60 32 1/8 104 12 38 20 132 63 60 M8 x 1.25 11 8

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Component Parts Description Note Material No. 1 2 3 4 5 6 7 8 9 10 11 Angle Adjuster Stopper ring Aluminum die-casted Electroless nickel plated Stopper lever Carbon steel Electroless nickel plated Caution Lever retainer Zinc chromated Carbon steel 1.

LEYx-OMZ0015

Part name Qty (1) Electric Actuator /LEY Series 1 (2) Driver / LECS Series 1(in case with driver) (3) Motor cable Pre-installed (1) (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1(in case with I/O connector) LECSB(Pulse input) / LECSB-T(Pulse input / Positioning) (2) Driver (3) Motor cable (4) Encoder cable (5) Lock cable DC24 PC, PLC, etc (1) Electric Actuator (

48

83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x

Nozzle Type Ionizer

for piping IZN10E-11 With Stainless steel 316 One-touch fitting*2 + Anti-static tubing * Discharge time at a distance of 50 mm from the end of tube Tube I.D.: 5 mm Tube I.D.: 4 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 2 2 0.05 MPa 0.1 MPa 1 1 0.1 MPa 0.3 MPa 0 0 0 400 500 200 300 100 0 400 500 200 300 100 Maximum operating pressure is 0.1 MPa.1 Tube length [mm] Maximum

1

Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) *1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut * Refer to page 10 for dimensions. *1 Can be used for M and MZ only.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

circuit (power) 0: disable, 1: enable 1 Monitor short circuit (out) 0: disable, 1: enable 2 Inrush current filter 0: disable, 1: enable 2 3 Restart after short circuit (Output) 0: manual, 1: auto 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel parameter Channel 0 to 7 0 (Ch0 input) Monitor counter

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5