E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

LEJ-OM004xx

Contents Safety Instructions. 2 1.Outline of clean room specification. 4 1.1 Grease used . 4 1.2 Recommended tube diameter. 4 2.Raising dust characteristic . 4 2.1 Recommended tube diameter. 4 2.2 Amount of vacuum aspiration . 5 3.How to Order . 6 4.Construction. 7 1 11-LEJ Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and

MY2

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket X417 1 1 1 1 2 1 1 Nil W Z L H LZ HZ Nil W L H L, H, LS, HS X416 on one side X416 on both sides (one on each side) X416 on one side, X417 on the other side X416 on L unit side X416 on H unit side X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side

Thermo-chiller

k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Contact output signal 1 Operation status signal output 0 The pin numbers and output signals can be set by user.

7.4

5 R2 3 X (31) 16.3 28.7 P 1 6.8 P 1 22.8 17.2 R2 3 2 x M5 x 0.8 3(R2) port 7.3 36.2 Stations 1 2 3 4 5 6 7 8 n D side U side Grommet 300 (Lead wire length) 48 39.5 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) B 2 B 2 16.5 11 A 4 A 4 81 (Closed center) 14.4 3.5 2n x V2, V3, V4, M3 <4(A), 2(B) port> V2: 2 Barb fitting V3: 3.2 Barb fitting V4: 4 Barb fitting M3: M3 thread Indicator

VDW

N.C. 0.12 0.03 0.35 0.03 0.72 1 M5 1/8 (6A) 0.04 0.13 0.96 VDW200 0.52 0.04 1 0.31 0.08 0.45 0.09 1.9 1.6 0.52 0.16 0.52 0.16 3.8 2 1.8 1/8 (6A) 1/4 (8A) VDW300 0.13 0.38 1.0 3.1 0.28 0.52 0.30 0.50 0.12 6.7 3 1.5 0.44 0.49 0.46 11 4 17-2-75 16 Series VDW200/300 Construction VDW250 VDW350 i o !0 i !1 o w !0 !

3 Port Solenoid Valve Metal Seal Series VZ200 1

Note VZ4000-22A For VZ42 AN110-01 Noise reduction: 21 dB (13 x 38l ) AN203-02 Noise reduction: 25 dB (16 x 36l ) Description R 1/8 R 1/4 (2) Silencer Note 1) For body ported type Note 2) For sub-base mounted type 4-15-10 11 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 How to Order Option 01 1 2 VZ4 G 1 Foot bracket F Silencer U Foot bracket + Silencer K Only body

VSA4

0.31 0.31 0.30 0.33 b 0.34 0.47 0.51 0.34 0.47 0.51 0.34 0.44 0.48 0.33 0.48 0.53 Cv 1.0 1.2 1.4 1.0 1.2 1.4 1.0 1.2 1.3 1.1 1.2 1.3 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

Environment

1 Controller/Driver type*1 !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 12 16 20 25 8 8 8 9.5 6.8 6.8 6.9 8.1 #8-32UNC #8-32-UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

IDX-OM-W093

. 10-1 10.3 . 10-2 10.4 . 10-2 11 R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series

8", 5/32", 1/4", 5/16", and 3/8".

8", 5/32", 1/4", 5/16", and 3/8".

8", 5/32", 1/4", 5/16", and 3/8".