Precision Cylinder Series MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

Sine Rodless Cylinder Series REBR Direct Mount Type

6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

MQQ

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CLQ

Component Parts No. q w e r t No. !7 !8 !

180

For details, refer to the IDK series in the Best Pneumatics No.6. 705 MHY2 Series Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

ZPT/ZPX

Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

KJ

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

Rotary Actuator

R o t a ti o n R e r g o a n t n a a g ti r o e n n o r ti a a n t o g R e Symbol: C40 Symbol: C41 Symbol: C42 The rotation range and the angle adjusting direction of the angle adjustable type are changed. The rotation range and the angle adjusting direction of the angle adjustable type are changed.

VZ100/300/500

Nil Rc G NPT NPTF 02 2 stations R port 00F 00N 00T 20 20 stations P port R port V100 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Applicable tubing O.D.

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N