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Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS32S3100, 200, 300, 400500, 600, 700, 800401010001000800620500??

Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS32S3100, 200, 300, 400500, 600, 700, 800401010001000800620500??

Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS32S3100, 200, 300, 400500, 600, 700, 800401010001000800620500??

Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

Refer to "3.5 Pairing" for details on pairing. (2) Click [FCS Setting]. -27No.EX##-OMV0017-D Set using the [Frequency Channel Select Window]. (1) (2) (1) W-LAN Channel indicators The W-LAN indicators make it possible to select frequencies corresponding to W-LAN channels at one time. * In the example above, W-LAN Channel: CH.10 is selected. (2) W-CH indicators The W-CH indicators make it possible

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Power supply Single phase 200V AC (A type) or Single phase 100V AC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED) D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

Reed switch: D-90, D-97 (With lamp) Solid state auto switch: D-FgN (3-wire type, NPN, W/LED D-FgP (3-wire type, PNP, MLED) D-FgB (2-wire type, w/LED) bing system for vacuum entry (Pad dia.: 02-o50) ) thread mounting> Cap porting The piston rod on the vacuum side is not projected externally. The vacuum entry tube does not move under operaticn of the piston.

Body opton.ombi.albn s Nominal bore size Actuation ffi 1 Nol aEiab e wilhout auo switch 1 Nol a ab e wilh Doub e fod (W) r Nol a@ lable w lh spr n9 retum or spr n9 xlsd orwrrh supercompacr typ (z) .

(Values at the initial period) Solenoid Specifications Electrical entry Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 12, 24 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz 3.5 VA/50 Hz, 3.3 VA/60 Hz 3 VA/50 Hz, 2.8 VA/60 Hz 4 W (Standard), 2 W (Low power consumption type) 4.3 W (Standard), 2.3 W (Low power consumption type) Varistor Diode (Varistor for 12 VDC

Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Buffer body Aluminum t Electroless nickel plated Buffer adaptor Brass y q q q ZL Electroless nickel plated Adaptor A Brass u Electroless nickel plated X type adaptor

(Values at the initial period) VT VP VG Solenoid Specifications VP Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 6, 12, 24, 48 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz 3.5 VA/50 Hz, 3.3 VA/60 Hz 3 VA/50 Hz, 2.8 VA/60 Hz 4 W (Standard), 2 W (Low power consumption type) 4.3 W (Standard), 2.3 W (Low power consumption type) Varistor Diode (Varistor for 12 VDC

Power consumption/DC 2 W, 2.2 W (With indicator light) 1. Since this valve has slight air leakage, it can not be used for vacuum holding (including positive pressure holding) in the pressure container. Specifications different from standard are as follows. 25 ms or less (at 0.5 MPa) Response time (1) 100 VDC: 2.4 W Note 1) Refer to Response time of standard specifications.