Air Slide Table

m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 1 1 0 0 20 40 60 80 100 120 0 0 20 40 60 80 100 120 140 160 180 200 L3: Overhang Allowable range: 120 mm L3: Overhang Allowable range: 200 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20B-100Z MXQ20B-125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 Max. operating pressure: 200 mm/s 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200

V

(300mm) LN L Type Connector without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Connector MO M Type Plug without Connector Internal Pilot R External Pilot V O LTA G E *1 100VAC *2 200VAC 3 110VAC *4 220VAC (D, DO Only) 5 24 VDC 6 12 VDC *2 200VAC (L M Only) *4 220VAC (L, M Only) * Special Order Courtesy of Steven Engineering, Inc. !

Table of Contents

Detection nozzle: 1.5 Supply pressure: 100 kPa Set distance: 0.15 mm Detection side piping: 6 x 4 Detection nozzle: 2.0 Supply pressure: 100 kPa Set distance: 0.3 mm IF Data 3 1.5 Piping tubing length Piping tubing length 10 m 2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1

Battery-less

Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397

MY1

H unit 500 400 300 L unit Air cushion 200 100 1 2 3 4 5 10 20 30 40 50 Adjusting bolt m, m, m max.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

One-touch fitting (Metric size) One-touch fitting (Inch size) Symbol Port size Applicable series C4 C6 M C4 C6 C8 M Symbol Port size Applicable series N3 N7 M N3 N7 N9 M 5 32" 1 4" 4 One-touch fitting One-touch fitting One-touch fitting Mixed 10-SY3000 10-SY3000 6 One-touch fitting Mixed 5 32" 1 4" 4 One-touch fitting One-touch fitting One-touch fitting One-touch fitting Mixed 6 One-touch

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

Electric Actuator/Slider Type

M J D 4 x O1 thread depth R M Y K Note 2) L B + Stroke 4 x O1 M S A + Stroke thread depth R EH Note 1) Range within which the rod can move.

SX

4 5 L plug connector (L): SX3 40(R)-L-01 M plug connector (M): SX3 40(R)-M-01 Manual override (Press and turn for the locking type.)

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

] 3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D: 4 and 5/32" (3.2) 32.3 (Light/surge voltage suppressor) : 6, 1/4" + 23 20 12.7 28.1[35.1] 2-2.6 (For mounting) 3 11 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Modular Design with Uniform Body Style

1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 P3 A B C E F G J K M N Q1 Q2 R S U V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4

Made to Order

H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.) Hose nipple Width across flats 8(7) (12) The above figure shows the 6/4 hose nipple mounting dimensions.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) Product image Number of functional poles M12: 5 pins Key type A-coded (Normal key) DeviceNetTM / CANopen 5 3 4 4 3 5 1: DRAIN 2: V+ 3: V 4: CAN H 5: CAN L 1: 2: 3: CAN GND 4: CAN H 5: CAN L (Red) (Black) (White) (Blue) 1 2 Pin assignment 2 1 Plug, A-coded Socket, A-coded (Viewed from the plug/socket side) Fixed cable length 0.5 m, 1 m, 2 m, 3 m, 5 m, 10 m Cable O.D. 6.7 mm

Smooth Cylinder/Low Speed Cylinder

Clevis Pin/Knuckle Pin Material: Carbon steel (mm) Applicable bore size (mm) d drill through Applicable cotter pin Applicable flat washer Dd9 L m Part no. l 2 x d Dd9 Clevis Knuckle CDP-2A 40 10 0.040 0.076 46 4 Polished round 10 38 3 3 x 18l 40, 50, 63 CDP-3A 50 12 0.050 0.093 55.5 4 Polished round 12 47.5 3 3 x 18l m L CDP-4A 63 16 0.050 0.093 71 5 Polished round 16 61 4 4 x 25l l 80

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Refer to page 606-7.) 606-2 B 4-Axis Step Motor Controller (Parallel I/O/ Type) JXC73/83/93 Series How to Order Parallel I/O (JXC73/83) JXC 7 3 2 Controller I/O type I/O cable, mounting Symbol I/O type 7 NPN 8 PNP Symbol I/O cable Mounting 1 1.5 m Screw mounting 2 1.5 m DIN rail 3 3 m Screw mounting 4 3 m DIN rail 5 5 m Screw mounting 6 5 m DIN rail 7 None Screw mounting 8 None DIN rail

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Table of Contents

Note 2) Value on option V, M (Non-leak, Vacuum). Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.