Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported

Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: -, CE Compliant: -

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: -, CE Compliant: -

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: -, CE Compliant: -

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)

Vacuum Equipment

Calculation 1. Average adsorption flow to achieve adsorption response time Calculation 1. Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.)

VQ7-6/7-8

Spacer (1) Spacer (2) Spacer (1) VQ7 Spacer (1) Throttle valve spacer Spacer (1) Spacer (1) Throttle valve spacer Note 2) Note 3) Note 3) Note 1) EVS Note 1) A throttle valve spacer and double check spacer (including those with residual pressure release valve) cannot be combined.

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Pulse Valve

IN side IN side IN side 12 ATEX Compliant Pulse Valve Valve for Dust Collector 55-JSXFA Series RoHS II 2 G Ex h IIB T6 Gb II 2 D Ex h IIIB T72C Db 40C Ta +60C How to Order JSXFA B 06 R E 1 55 Compression fitting type Direct piping type e r t y w q w IN/OUT port size ATEX category 2 q Piping e Thread type E Compression fitting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (

VM

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 61 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

Soft Start-up Valve

across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)m-A 3/4, 1 3/4, 1 3/4 128 109 59 53 74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X

RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000