5 Port Solenoid Valve

10 (M4 x 34) 2 VP4 Valve + Restrictor spacer (VVQ5000-20A-1 5 ) q AXT632-25-5 (M4 x 82) 4 VQ 1/2 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Rotary Actuator/Vane Type

D-M9m m: Operating range Size q m: Operating range q d: Hysteresis range 10, 15 170 20 20, 30 100 15 40 86 10 Actuated position: ON Auto switch d: Hysteresis range OFF D-S/T99(V)m, S9P(V), S/T79, S7P, D-97/93A, 90/90A, R73/80m (OFF) Magnet Size q m: Operating range q d: Hysteresis range 10, 15 110 10 20, 30 90 40 52 8 Note) Since the figures in the above table are provided as a guideline

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

Hydraulic

Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) M8 x 1.25 9.5 depth 5.4 20 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 M10 x 1.5 9.5 depth 5.4 25 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 M12 x 1.75 11 depth 6.5 32 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 M16 x 2 14 depth 8.6 40 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 M20 x 2.5 17.5 depth 10.8 50 71 60 11 28 24 24 8 58 11

0.4

10 pieces.

5 Port Solenoid Valve

Ported Type 11 Bottom Ported RoHS How to Order Manifold SS5Y S 10 3 NA C6 N 05 U Refer to page 11 for Type 11/Bottom ported dimensions. q r w t e y u i o q Series y P, E port entry t Valve stations 3 5 U D B In the case of the 32-output SI unit SY3000 SY5000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Symbol 02 Stations Note 2 stations w Type Double

One-touch Fittings Series KQ2

22.5 15.5 9.6 17.5 10 2.5 25.5 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Air Cylinder Series CM2

Q H H1 K KA MM N NA NN P QY S TD TT TX TY TZ Z ZZ B2 I D G Bore size -X 8 1 20 18 41 5 6 15 24 14 62 8 10 32 32 52 36 103 13 5 28 26 8 M8 x 1.25 M20 x 1.5 15.5 19.8 8 1 25 22 22 45 5.5 8 15 30 14 62 9 10 40 40 60 40 107 17 6 32 10 M26 x 1.5 M10 x 1.25 33.5 19.5 Individual -X 8 1 32 22 9 45 5.5 10 15 16 64 9 10 40 40 60 40 109 17 6 32 12 M26 x 1.5 M10 x 1.25 19.5 37.5 34.5 25.8 4 1 40 24

Electric Actuator/Slider Type

Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] 500 500 500 Mey m 0 0 0 0 4 2 6 8 10 5 10 15 20 0 0 10 20 30 L5 Work load [kg] Work load [kg] Work load [kg] 10 Series LEFS Table Accuracy A side B side Traveling parallelism [mm] (Every 300 mm) Model q C side traveling parallelism to A side w D side traveling parallelism to B side q LEFS25

EX510

11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

Stability of suction position,

to 125)(UM/BM)lJB (10/30/50) q Stopper Form/Diameter Part no.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Modular F.R.L. Units

1 q r e w t i u y o !0 !