2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Cylinder stroke (mm) Port thread type Maximum manufacturable stroke (mm) Bore size (mm) Bore size 16, 20 Symbol Type M thread Rc NPT G Standard stroke (mm) Nil 25, 32, 40, 50, 63 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 3000 TN TF 16, 20, 25, 32 40, 50, 63 Piping The stroke can be manufactured up to the maximum stroke from 1 mm stroke in 1 mm increments

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

5 Port Solenoid Valve Series VQZ1000/2000/3000 Single Unit [Option] Body Ported Plug Lead Unit Made to Order (For details, refer to page 975.)

Pressure Switch/Reed Switch Type

Units Pressure Switch with Spacer JIS Symbol 15 23 IS10M 30 (13) (23) (5000) (3000) (500) q w Pressure switch Semi-standard: Select one option each in a through c. Place them in alphanumerical order.

Speed Controller: Standard Type Series AS In-line Type

1 14143 14144 14147 Stainless steel NBR 15-9-30 Speed Controller: Standard Type In-line Type Series AS Dimensions: AS1000-M3 Dimensions: AS1000-M5 Male M5 x 0.8 Female M5 x 0.8 Dimensions: AS2000/3000 Dimensions: AS4000 2-1/4 to 1/2 AS 2-port size ASP ASN AQ ASV Dimensions AK Max. Min.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Switch Variations/Basic Performance Table New New PFMV PFM PF2A PFMB Fluid Series Enclosure IP40 IP40 IP40 IP65 Dry air, N2 Dry air, N2 Dry air, N2 Dry air, N2, Ar, CO2 Setting Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 10 L/min 5 to 50 L/min 50 to 500 L/min Rated flow 0 to 0.5 L/min 0.5 to 0.5 L/min range 2 to 200 L/min 5 to 500 L/min 150 to 3000 L/min 0 to 1 L

/

Table (1) Electrical Entry / Light/Surge Voltage Suppressor Without light/surge voltage suppressor With surge voltage suppressor S With light/surge voltage suppressor Z Cable for M12 connector Rated voltage Electrical entry Nil V100 200 1 4 T D W DO T D W DO AC Specifications DC AC DC Cable length (L) Note) 1 2 3 4 8 9 1000 [mm] 3000 [mm] 5000 [mm] 4-pin type 5-pin type DC When selecting

SI Unit for Vacuum Manifold

EX500-AP0*0-* -36No.EX-OMZ0018 (5)Cable with communication/power connector on one side (SPEEDCON) Part number : PCA-140180 4 Cable length (L) 4 1500 mm 5 3000 mm 6 5000 mm Item Specification Pin No.

PSxx-PSV0007

ISE20B : 0x02440x1450 ZSE20B P_2(n_2) (5805200) 0x03FE (1022) 0 R/W (Setting of switch U16 ZSE20B : 0x02580x1450 (6005200) ZSE20BF : 0x03840x13EC (9005100) 0x0BB8 (3000) point of OUT2) ZSE20BF 0x0FA0 (4000) ISE20B 0x04B0 (1200) Setting of OUT2 hysteresis.

High-precision Digital Pressure Switch ( compatible)

P_1(n_1) (Selection of output set value) Setting range ISE79S0x03200x1450 Setting of OUT1 output set value 1012 0x03F4 0 R/W U16 3000 Y (8005200) H_1 (Setting of OUT1 hysteresis) Setting range ISE79S0x03E80x1518 OUT1 setting Setting of OUT1 hysteresis 1013 0x03F5 0 R/W U16 1200 Y (10005400) P1L(n1L) (Lower limit of window comparator) Setting range ISE79S0x03200x1450 Setting of OUT1 output

EX500-GPR1A.eng

For GW unit Input unit manifold configuration M12 Wiring (continued ) Display/Switch Setting 28.3 14.9 M12 Branch cable with M12 connector 31.3 48 GW unit L=300, 500, 1000, 3000, 5000 (mm) Straight Connector Type Angle Connector Type EX500-AC -SSPS EX500-AC -SAPA L L 6 6 Input unit manifold 52 M12 M12 31.3 16 32.3 COM D COM C COM B COM A DIA Turns on: DIA is abnormal.

EXxx-OMP0004CN

mm 050 5000 mm 100 10 mm (EX9-ACMJ-SSPS) (EX9-ACMJ-SAPA) CC-Link A code A code 54 7.7 mm 0.5 mm 2/AWG20 0.34 mm 2/AWG22 2.55 mm 77 mm -30No.EX-OMP0004CN-I (1) EX9-AC0 1 0-1 L 1 1000[mm] 3 3000[mm] 5 5000[mm] B code No. 6.6 mm 1 DC24 V() AWG22 2 0 V() 1.65 mm 3 DC24 V() 40 mm 4 0 V() 5 (2)(SPEEDCON ) PCA-140180 7 L 7 1500[mm] 8 3000[mm] 9 5000[mm] B code No. 5.0 mm 1

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

:g.*1ii1*,ii1r,.:.'' 4.5 Ports Solenoid Valve NVZ1000/3000/5000 NVZl000 o o ; NVZ3000 (Body ported type Cvo.2) NVZ5000 ::.:l L r r s L I 5 l r ' ' . .

Electro-Pneumatic Pressure Regulator Series ITV

Detection pressure 10080kPa/ITV1000, 2000, 3000 Note) Only 4 to 20mA input signal option available at this time. No monitor voltage output available.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

ZSE40(F)/ISE40W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port. (Refer to Specific Product Precautions 4 on the back cover for details.)

High-precision Digital Pressure Switch ( compatible)

Setting range ISE70: 0x0244 ~ 0x1450 P_1(n_1) (Selection of output set value) Setting of OUT1 output set value U16 3000 Y 1012 0x03F4 0 R/W (580 ~ 5200) ISE71: 0x02E2 ~ 0x1450 (738 ~ 5200) Setting range ISE70: 0x03E8 ~ 0x15F4 H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis U16 1200 Y 1013 0x03F5 0 R/W (1000 ~ 5620) ISE71: 0x03E8 ~ 0x1556 OUT1 setting (1000 ~ 5462) Setting range

High-precision Digital Pressure Switch

Setting range ISE70G0x02440x1450 (5805200) ISE75G0x03160x1450 (7905200) P_1(n_1) (Selection of output set value) Setting of OUT1 output set value ISE76G0x03200x1450 OUT1 setting U16 3000 Y 1012 0x03F4 0 R/W (8005200) ISE77G0x03200x1450 (8005200) ISE78G0x03200x1450 (8005200) Setting range ISE70G0x03E80x15F4 (10005620) ISE75G0x03E80x1522 (10005410) H_1 (Setting of OUT1 hysteresis) Setting of

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range

Ionizer

L 1000 mm 2000 mm 3000 mm 4000 mm 5000 mm 7000 mm 10 mm IZS31-CF01-X210 IZS31-CF02-X210 IZS31-CF03-X210 IZS31-CF04-X210 IZS31-CF05-X210 IZS31-CF07-X210 IZS31-CF10-X210 Connection cable from the right-hand side of the control unit Frequency selection switch 12P modular jack (Plug for power cable) 190 36 16 30 Order connection cables separately.