. 5 1 5 . 4 6 5 . 4 2 2 . 5 1 7 . 3 1 6 4 5 . 8 1 6 . 5 2 7 . 7 1 2 2 0 1 0 1 9 9 0 1 U 2 Q K 5 . 8 1 5 . 1 7 5 . 7 2 5 . 8 1 1 . 6 1 5 . 0 5 1 2 0 4 4 . 8 2 6 2 2 1 2 1 9 9 2 1 U 2 Q K 9 . 0 2 5 . 5 7 0 3 9 . 0 2 1 . 8 1 5 . 3 5 2 2 4 . 7 5 4 . 5 4 2 3 6 1 6 1 9 9 6 1 U 2 Q K 5 . 6 2 0 9 5 . 6 3 5 . 6 2 3 2 5 6 5 2 3 1 1 ) 3 1 1 ( 8 7 Branch Y: KQ2U Inch Applicable tube O.D.
CA BA 0 0.3 BA 0 0.3 Drawing of view (E) (mm) Bore size 20.5 20.5 9.5 9.5 NA Z 16 10 15 15 18.3 15 18.3 12 20 14 5 4 8 8 5 5 11 11 CA GA BA CB GB 5 5 H NB S FB 17.5 19 FC 5.5 5.5 FT 2.3 2.3 FX 33 33 83 82 M5 x 0.8 M4 x 0.7 MM FY 20 20 FZ 42 42 GC F D BB A 55 54 M12 x 1.0 M10 x 1.0 NN 28 28 17 20 With air cushion With air cushion type is not available for 21-/22-CJ2.
BA 0 0.3 CA BA 0 0.3 Drawing of view E Bore size (mm) S NA Z NB H CA GA BA CB GB 14.5 4.5 1.6 24 6 15 15 3 8 12 11 28 17 24.5 7 85.5 M3 x 0.5 14 32 57.5 T 3 M8 x 1.0 NN FB FC FT FX MM FY FZ GC F D BB A 20.5 20.5 9.5 9.5 83 82 M5 x 0.8 M4 x 0.7 55 54 M12 x 1.0 M10 x 1.0 28 28 17 20 5 5 16 10 15 15 18.3 15 18.3 12 20 14 5 4 8 8 5 5 11 11 17.5 19 5.5 5.5 2.3 2.3 33 33 20 20 42 42 With air
5.5 30 10 9.5 6.6 6.5 48 45 26 40 51 28 38 25 5 15 5.5 35 12 12 6.6 6.5 56 52 28 50 64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40
82 M plug connector (M) 74.5 135.5 (3 Position) <137.5> 122.5 (Double) <124.5> 91.5 (Single) <92.5> 56.5 (Lead wire length) 58 <63> 300 1 P 61.5 <62.5> Cover diameter 1.5 Cross section 0.23mm2 R1 R2 5 3 73.5 1 P Indicator light R1 R2 < >: AC 5 3 Equation L1=16n+10 L2=16n+20 n: Station (Max. 20 stations) Dimensions 2 42 52 75 85.5 L n 3 58 68 87.5 98 20 330 340 362.5 373 15 250 260 287.5
LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty
Work weight: 0.05kg Example 25 Pressure 0.6MPa 20 0.5 0.4 Holding force (N) 15 13 0.3 10 0.2 5 0.1 Ex.)
5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 276 5 Phase Stepper Motor/With Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 10 D-5.1 through Refer to Cross section C-C, bottom view.
ND9206 13 13 16 19 120mm 15 14 40mm 3.5 5 40mm 9 11 140mm 17 16 50mm 4 6 50mm 10 12 VC_60 120mm ND9206 18 16 60mm 5 6.5 60mm 11 13 140mm 21 19 70mm 6 7.5 70mm 12 14 180mm 25 21 20mm 3 4 20mm ND9203 ND9206 VD_48 NDX VD_48 20mm 9 11 VC_70 140mm ND9206 20 19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm
25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber
0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20
Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014
(Non-locking) 1/8 (P , EA, EB port) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center/exhaust center/pressure center SYA5 20(-F2) C4, N3 C6, N7 C8, N9 3 4 5 1/8 (A, B port) 2-M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" 2 3.2 (For mounting
12 length 3.5 M14 x 1.5 42.5 M27 x 2 40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Bore size G S ZZ Bore size ZZ 20 5 37 (42.5) 78 (83.5) 20 63.5 (69) 25 5 37.5 (43) 81.5 (87) 25 64 (69.5) 32 5 38 (44) 82 (88) 32 64.5 (70.5) 40 5 44.5 (50.5) 95.5 (101.5) 40 72 (78) Bore size G S ZZ Bore size ZZ 20 7.5 49 (54.5) 90 (95.5)
12 8.5 20 16 11.5 25 3.5 3.5 5 5 10.9 6 6.5 14.3 8.5 085 8.6 086 8.7 087 8.8 088 8.9 089 9.0 090 12.5 17.5 125 12.6 126 12.7 127 12.8 128 12.9 129 13.0 130 175 17.6 176 17.7 177 17.8 178 17.9 179 18.0 180 9 6.5 20 13 8.5 20 18 13 27 4 4 5 5.5 11.6 6 7.5 16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 13.5 19.5 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 195 19.6 196 19.7 197
4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.
No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250
20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 19 19 22 26 26 30 19 19 19 24 24 29 14 20 20 25 25 30 Up to 1000 3 5 30 46 114 M14 x 1.5 161 78 18 160 110 146 128 212 112 255 16 64 110 Up to 1000 130 M16 x 1.5 182 95 23 180 132 169 144 236 118 275 18.5 74 120 Up to 1200 16 21 35 30 34 42 5 5.5 6 149 M18 x 1.5 204 106 36 118 200 167 195 162 265 132 320 18.5
080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51 62.5 80.5 101 129 149 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96
080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51 62.5 80.5 101 129 149 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96