HRX-OM-O021

HRX-OM-O021 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.4.2 Earth Label . 1-5 1.5 Safety

Modular F.R.L. Unit

Unit Air Filter + Regulator AC10B to 60B Made to Order Page 20 AC40B AC20B Standard Specifications AC25B AF30 Model AC20B AF20 AC30B AF30 AC40B AF40 AC40B-06 AF40-06 AC50B AF50 AC55B AF60 AC60B AF60 AC10B AF10 Air filter Component AR25 Regulator AR20 AR30 AR40 1/4 3/8 1/2 1/4 AR40-06 AR50 AR50 AR60 AR10 1/4 3/8 1/8 1/8 1/4 1/8 1/4 3/8 1/8 3/4 1 1/4 M5 x 0.8 Port size 3/4 1 1 Note 1) 1/4 1

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

LEC-OM02704CN

*CDV 1 116384 (1) 1/9 CMX/CDV 9 (2) CDVSTN 32767 (3) CMXCDV 10 (A37) PA06PA07116384 nm PA06 PA07 15 74 15 (a) 1 5020 PA0650 PA0720 50 20 (b) 2 50201/9 50 20 50 450 1 9 20 PA06450 PA0720 20 1/9 15 75 15 (7) PA08 ATU 0001h PA09 RSP 12 132 8.2 (a) (PA08) PA08 0 0 0 PB0 8 PB0 9 PB 1 0 0 PB0 6 PB0 7 PB0 8 PB0 9 PB 10 PB0 6 1 1 PB0 7 PB0 8 PB0 9 PB 1 0 2 2 3 .

2/3 Port Valve

8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

MNB

8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 GA GC 45.5 52.5 58.5 68 81 96 Ee11 30 35 40 45 45 55 GB 13 14 15.5 16.5 19 19 GF 18.3 19.5 22.4 20.7 26 26 GL1 12 12 15 12 18 20 GR 4 4 5 9 11.5 17 GE GD 13 16.5 19 23 33 37.5 GL 8.5 10 12.5 17.5 22 25 19.5 27 32 32 37 37 Up to 500 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 88.5 10 14 18 18 22 26

MNB

8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 GA GC 45.5 52.5 58.5 68 81 96 Ee11 30 35 40 45 45 55 GB 13 14 15.5 16.5 19 19 GF 18.3 19.5 22.4 20.7 26 26 GL1 12 12 15 12 18 20 GR 4 4 5 9 11.5 17 GE GD 13 16.5 19 23 33 37.5 GL 8.5 10 12.5 17.5 22 25 19.5 27 32 32 37 37 Up to 500 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 88.5 10 14 18 18 22 26

MY1

20 10 10 1.

Thermo-chiller

Current (% for chiller main breaker volume) HRS100-A/W-20 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 28 Series HRS100/150 Specic Product Precautions 5 Be sure to

MNB

8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V W ZZ VA GA GB GC GD J GL GL1 GR GE GF 8.5 10 12.5 17.5 22 25

LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

RHC

3,000 6 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 10 1/4, 3/8 6 1/4, 3/8 8 1/4, 3/8 10 1/4, 3/8 10 1/4 Maximum speed Vmax (mm/s) 1000 3 25 20 1500 4.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 20 2000 6 2500 7.5 = 0.7 0.5 3000 9 10 0.1 0.3 500 2.5 1000 5 0 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax (mm/s) 2000 10 32 1/4 1

CHKD/CHKG

51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

Basic Type/Direct Mount Type

43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CY1H CY1F CYP P (Piping port) Model TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50