Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

 MICRO MIST SEPARATOR REGULATOR 

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Oil Filter FH150 Series

Precautions FH150-02 to 04 q Mounting Confirm IN and OUT before mounting.

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

A

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

Soft Start-up Valve AV2000/3000/4000/5000

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

VEX1

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 ForVEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 ForVEX133B(FKMseals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B Note)

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

F Analog 4 to 20 mA G External input Note 4) H External input Note 4) Note 4) Accumulated flow, peak flow Unit specifications and minimum flow can be reset by external signal input.

ZQ-OM01301

ZQ-OM01301-A 9.2 Weight 9.3 Supply/release pilot valve specifications Single part number Model, additional specifications Weight [g] ZQUA-K15L-F-00-N (Basic type for single unit) 70 ZQMA-K15L-F-0 (Basic type for manifold) 70 Without release valve -10 Supply valve N.O. specification +2 With vacuum pressure switch (Lead wire is not included) +20 Bracket assembly type +25 Lead wire with connector

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02

Table of Contents

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

Air Cylinder

D-X Technical Data 321 CG1 Series Basic Spring return: CG1BN Width across flats KA Plug with fixed orifice GA F GB RcP MM H1 R0.4 D I E 0 0.05 E 0 0.05 C R0.4 H A AL TA K 4 x TC Width across flats B1 8 J ZZ + Stroke S + Stroke F TB NA C Spring extend: CG1BN Width across flats KA GB Plug with fixed orifice RcP GA F MM H1 R0.4 D I E 0 0.05 E 0 0.05 C R0.4 H + Stroke A AL K TA 4 x TC F TB Width

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

CC-Link-E

S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.