Safety Instructions Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1. Check tubing for damage before installing. Confirm model size, etc. 2.
x 1 9 0V 75 220 55 114 89 75 56 M6 x 1 9 50msec PF2A7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow rate
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8.5 M6 x P0.5 5.5 71 11 18 123 44 51 90 10 9.5 IR VEX Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 AMR OUT(2) SUP(1) 10 43 35 EXH ITV 2-Rc 1/8 Port size 2-Rc 1/4 Port size Rc 1/8 Pressure gauge port 43 50 50 35 2-Rc 1/8 Pressure gauge port 60 IC VBA IR300-
Solenoid Specifications Applicable power amplifier VEA250, VEA251 Max. current 1 A Coil resistance 13 (20C) VER2000 VER4000 Rated power consumption 13 W (20C, with maximum current) Class H or equivalent (180C) Coil insulation type 140C (With maximum current) Max. temperature rise DIN terminal Electrical entry Manifold Accessory Model VER2000 VER4000 Mounting screw (With washer) M5 x 45 M6
x 1 9 0 V 75 220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow
End block side MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 C US TYPE1 EX500-IE1 (PNP) R 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 .. 4 sets EX500-IE3 .. 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 EX500-IE1 (PNP) R MADE IN JAPAN C US TYPE1 R Input manifold EEX500-IB1-E6 (1 set) MADE IN JAPAN C R IP65 24VDC/60mA IP CODE VOLTAGE (PNP) EX500-IE3 US IP65 24VDC/60mA
(Symbol 1) IN (Symbol 2) OUT Bracket can not be attached to the model without a sub-plate. 5 6 24 VDC 12 VDC Sub-plate material/Port size 14R N.O. 2 Nil Without sub-plate PFA PFA M6 1/4-28 UNF (Symbol 3) IN (Symbol 2) OUT 2 2U Wetted part material 16R N.C.
-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a
Hex Cap Bolt (applicable hex. wrench normal size 5) M6 Hex Cap Bolt (applicable hex. wrench normal size 5) Pilot Exhaust Port (both sides) Label Flushing Button Bleed Valve Bracket Mounting Hole (both sides) Bracket (Option) Drain Inlet 1 2 Female Thread See How To Order for type of thread.
IP CODE IP65 INPUT 16 EX500-IB1 VOLTAGE 24VDC/650mA EEX500-IB1-M6 (1 set) Input unit side MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN TYPE1 US C R 24VDC/60mA/IP65 (PNP) EX500-IE1 Input block EX500-IE1 (4 sets) TYPE1 US C 24VDC/60mA/IP65 (PNP) EX500-IE1 R EEX500-IB1-E8 . 1 set EX500-IE1 . 8 sets MADE IN JAPAN TYPE1 US C 24VDC/60mA/IP65 (PNP) EX500-IE1
Fixing Threads Tightening Torque Connection thread Applicable tightening torque Nm Connection thread Applicable tightening torque Nm 0.63 1.5 3 5.2 12.5 24.5 42 M3 M4 M5 M6 M8 M10 M12 (When using optional accessories/dustproof filter set) 1. Use the attached surface fastener (with adhesive tape) to affix the dustproof filter to the panel of the Thermo-cooler. 2.
IP CODE IP65 INPUT 16 EX500-IB1 VOLTAGE 24VDC/650mA EEX500-IB1-M6 (1 set) Input unit side MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN TYPE1 US C R 24VDC/60mA/IP65 (PNP) EX500-IE1 Input block EX500-IE1 (4 sets) TYPE1 US C 24VDC/60mA/IP65 (PNP) EX500-IE1 R EEX500-IB1-E8 . 1 set EX500-IE1 . 8 sets MADE IN JAPAN TYPE1 US C 24VDC/60mA/IP65 (PNP) EX500-IE1
B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42
Body Caution M5 hexagon socket head cap screw q M6 special screw (Do not disassemble.) Caution M6 special screw (Do not disassemble.) M5 hexagon socket head cap screw w Fig.1 Caution 1. Before disassembling, be sure to shut off the pressure supply, and then release the residual pressure. 2. After assembly, confirm that there is no fluid leakage.
Flange type Foot type Model Applicable bore size (mm) Allowable Rotating angle Ambient eccentricity U (mm) Operating pressure temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6
Connection thread symbol for the pad Fixed orifice size Male thread connection Applicable fixed orifice size Fixed orifice size (mm) Symbol Thread size Symbol 0.5 0.3 0.7 1.0 03 05 07 10 A5 A8 A01 AG1 AN1 0.3 M5 No.0.8 M8 0.5 R1/8 0.7 Male thread G1/8 1.0 Pad side NPT1/8 Female thread connection Applicable fixed orifice size Symbol Thread size 0.3 1.0 0.5 0.7 B5 B6 B01 BG1 BN1 M5 No.0.8 M6
(mm) Pad type Material ZPT Series Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 Connection 2004 2 x 4 Symbol Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 4010 4 x 10 (Thin section series) 02 04 2 M5 x 0.8 M6 x 1 M8 x 1 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 4 Male thread Female thread
Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30
Hex Cap Bolt (applicable hex. wrench normal size 5) M6 Hex Cap Bolt (applicable hex. wrench normal size 5) Pilot Exhaust Port (both sides) Label Flushing Button Bleed Valve Bracket Mounting Hole (both sides) Bracket (Option) Drain Inlet 1 2 Female Thread See How To Order for type of thread.
Dimensions Outlet pressure (MPa) 136413 ARM2500 ARM3000 With flat washer 4 Hexagon socket head cap screw (M5 x 70) 136313 VEX1 With flat washer 4 Hexagon socket head cap screw (M6 x 85) SRH SRP Option/Bracket Assembly SRF Individual IN type can be used as a single unit regulator.