SUP/EXH BLOCK ASSEMBLY, 4/5 PORT SOLENOID VALVE, O84, 0.12 lb

INTERMEDIATE SUP/EXH BLOCK ASSY, 4/5 PORT SOLENOID VALVE, O84, 138.00000 lb

ELECTRO REGULATOR SUP/EXH BLOCK, 4/5 PORT SOLENOID VALVE, O84, 130.60000 lb

VQZ1000/2000/3000

, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5 39.5 Residual pressure

Table of Contents

C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

VQC

B Silencer (For EXH port) AN200-KM8 AN203-KM8 Back pressure check valve assembly [-B] VVQ1000-18A 19 Individual EXH spacer VVQ1000-R-1-C6 COM 13 C6 (EXH port) Connector terminal no. 6 One-touch fitting Standard manifolds are for double wiring, but mixed wiring (single and double wiring) can be specified as options.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations