SV

U side D side POWERRUNSD RD ERR Name of terminal block, LED Note Cable wiring ADDRESS NO.

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For R and U, only DC voltage is available.

Table of Contents

side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

Valve Single Unit

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

Valve Single Unit

position U U side D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

Table of Contents

7 u !6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

0.4

VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Fieldbus System

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U U U 12 19.5 20.5 26.5 23 26 22 16 22.5 23.5 29.5 26 29 25 20 24.5 25.5 31.5 28 31 27 25 27.5 28.5 34.5 31 34 30 32 26.5 31.5 32.5 38.5 35 38 34 27 29 40 30 44 35 36 42 38.5 41.5 37.5 30.5 32.5 50 36 50 41 42 48 44.5 47.5 43.5 36.5 38.5 63 39.5 56.5 47.5 48.5 54.5 51 54 50 40 42 80 49.5 66.5 57.5 58.5 64.5 61 64 60 50 52 100 59.5 76.5 67.5 68.5 74.5 71 74 70

45

U D B C4 C6 C8 (Rail mounting hole pitch 12.5) 1-6-133

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

u u u u u u u u u u u u u u u u u u U U U U U U U u u u U U U U U U U U U U U U U U U U u u u U 5 V,12 V IC circuit Reed switch Solid state switch 12 V Diagnostic indication (2-color display) 5 V,12 V IC circuit Relay, PLC Grommet 24 V Yes 12 V 5 V,12 V IC circuit Water-resistant (2-color display) 12 V Magnetic field resistant (2-color display) 2-wire (Non-polar) 3-wire (NPN equivalent

NCQ2/CQ2

22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 U 21.5 22.5 25.5 28 36 38 43.5 48.5 57 65.5 12 16 20 25 32 40 50 63 80 100

Electric Actuator/Slider Type

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

V100

For R and U, DC voltage is only available.

High Vacuum Angle Valve

U type: DC only.