IZx-OMX0087

) Note 18) Note 18) Note 18) Note 17) OFF ON ION BALANCE Note 19) Note 19) Note 19) Note 19) OFF ON Display Ions are generated (green) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 23) Note 24) Note 21) Note 22) Note 23) Note 23) OFF ON Product type IZTP43(green) DAC/AC OFF ON Maintenance (green) NDL Note 26) Note 26) Note 26) Note 26) Note26) OFF ON Built-in sensor

JXCx-OMY0006

B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 A6 B6 (18) (6.3) 16 15 L (11) (30.7) -59No.

JXCx-OMU0026

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke (mm) 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18

1.1

At present, 18 organizations have been recognized as NRTLs.

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

T

Refer to pages 15-18-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. Burst pressure Refer to the burst pressure characteristics curve.

PEEK

Plate Orifice diameter 1.4 mm New New Orifice diameter 2 mm Orifice diameter 1.6 mm New Orifice diameter 1.1 mm LVM09/090 LVM10/100 LVM15/150 LVM20/200 LVM09/090 LVM10/100 LVM15/150 LVM20/200 Note) Kalrez is a registered trademark of DuPont Performance Elastomers.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) 12 Series CG1Y Mounting bracket dimensions are the same as those of the low friction, double acting, single rod type of Series CG1Q.

Air Cylinder NCM Series Stainless Steel Cylinders

'trllrF I s NPrF NCME 150 'Noter For Din hole location see NCMC dimensions lfrw XK A a I K L LB N Nll w l Y 7A 0.250 Y4-24 0.50 o.624 0.86 0.38 0.251 o.34 3.75 o.75 Va-18 0.50 0.95 o.62 4.03 w& 1a.50 o.sc 034 o.t51 o.34 3.56 o.?5 7*tA 0.50 io.95 o.62 3.84 106 (17e) 0.312 5.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24

HAW

18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 120 140 140 140 60 60 60 66 66 66 70 60 60 90 100 100 100 200 120 140 140 140 220 193 193 238 289 289 289 357 182 182 215 242 242 242 317 159 159 215 219 219 219 270 480 704 1056 1203 1703 1210 159 159 245 264 264 264 130 130 165 216 216 216 35 35 37 80 150 150 72 190 390 575 893 1038 1538 950 35 35 138 170 276 276 365

Check Valve Series AK

Calle 18 69-05 Apart.

Speed Controller: Standard Type Series AS In-line Type

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

Microspeed Cylinder

15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

IZx-OMP0064

50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100

SFOD-OMT0009CN

-COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

SFOD-OMT0010

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke [mm] 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and 15 8 4 18 9 5 24 12 6 24

3 Port Solenoid Valve/

1/4" (With check valve) (External pilot port) 2 x 1/2" [3(R) port] 6.5 67 2 x 6.2 (For mounting) Applicable cable O.D. 3.5 to 7 M12 connector 77.5 41.5 136 155 119 77.5 44.4 18.5 Vent port (6.4) 18 9.5 (86.3) (Variable throttle type) 27.2 117.3 (Max. 10) 236.4 8 70.2 124.8 99 View A M12 connector 36 27.2 18 e y w r 1/2" [1(P) port] Vent port (6.2) Pin number (22.9) (With check valve) t q