MXU

Note 3) ( ) in column W is the dimensions of D-A93.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS25A100, 200, 300400, 500, 600112.512 to 5003,000o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation);4236Servo motor (24 VDC)Incremental

Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS32S3100, 200, 300, 400500, 600, 700, 800401010001000800620500??

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (