m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
m (99.9% filtered particle size)150Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateSemi-standardRelieving type0.57
VEX3221: M5 VEX3222: None (PA/Pilot air port) 58.6 Air operated: VEX3220 61.8 M5 (Port P2/Pilot air) Max. 10 101.7 Pg7 Applicable cable O.D. 3.5 to 7 87.9 M5 (Port P1/Pilot air) 80.4 69.1 3R 1P M5 (PE/Pilot exhaust port) P1 2A 1 59.1 58.1 102.6 64.1 1732 3 Port 3 Position Valve VEX3 Series Dimensions: Base Mounted/VEX342 External pilot solenoid: VEX3421 Internal pilot solenoid: VEX3422 41
Coil type Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate type, type 41, S41, 42, S42 manifold Power saving circuit is not available for W type.
External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83
m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.43
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74