Stroke Reading Cylinder and Counter

W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Clean Air Module

LLB Series Flow Rate Characteristics LLB3-1-P1R1VSF: Standard (100 L/min) 100 120 0.3 MPa 90 Set pressure 0.4 MPa 100 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 80 70 80 60 0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow

Process Pump <Fluororesin Type> Series PA3000

[ANR]) Discharge pressure (MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

2/3 Port Valve

(No need to add options "S" and "L".)

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

NCQ8

L M9NL 197in (5 m) .

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150 75 100 10 20 30 125 75 100 150 20 30 125 10 40 50 13-/22-MXQ6(L) 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 1.5 10 13-/22-MXQ8(L) 2 2 6 10 25 26 36 12 12 16 20 35 1.5 11.5 13-/22-MXQ12(L) 18.5 8.5 8.5 15.5 15.5 34.5 34.5

Guide Table Series MGF ø40, ø63, ø100 1

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

REC

2-RcP NN CDH10 +0.058 0 G Plugged (M5 x 0.8) G H1 Standard port Width across flats B1 I Eh8 D MM AL CX0.1 0.2 K A U CZ N N F S + Stroke H L NA Z + Stroke RR ZZ + Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 Up to 700 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !

NCY2 series

Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !

COQ2BP

M8x1.2S 6.6 A 0 9 67 76 89 8 Ml 0X l .5 15 50 98. Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

Size: 46 (42.5 O.D.), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Size: 46 (42.5 O.D.), Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Size: 46 (42.5 O.D.), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Clear Cover Material: Polycarbonate, Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Size: 46 (42.5 O.D.), Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten)