MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Digital Flow Switch

L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Plate Cylinder

12 14 DH 11 13 13 17 19 DI 17 22 27 32 38 DJ 7 10 10 14 16 Part no.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

21

M5 x 0.8 56 9 10 40 40 60 29 103 90 M26 x 1.5 Rc1/8 62 9 10 40 40 60 29 109 96 M32 x 2 Rc1/8 67 10 11 53 53 77 36.5 125 109 Use a thin wrench when tightening the piston rod.

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

VDW

Series VXP 1 2 3 10 N.C.

PFxx-OMA1007

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.

VM

I 10 I G H F E X H .

Compact and Lightweight

51.4 ZH18DA-10-12-12 15.9 18.5 18.5 10 12 12 15.6 17 17 105.7 60.9 28.4 26.4 22 22 10 8 Refer to the standard bracket dimensions.

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

EX510

to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

Rotary Cylinder Series MRQ Size: 32, 40 1

(MPa) 1 0.4 0.5 0.6 0.7 10 CRQ2 7.