IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Shock Absorbers and Rate Controls

resred lIr) flor. l{rn/rytle (lloloq l{0. tt odell OEtl l ,5lllx l 20 25.0 0.3.3.J 260 126,000 t3,000 19 58 2,890 0.9 lR0tl.5lltxl 20 25.0 0.08-t.3 260 t26,000 13,000 49 68 6,660 0.9 Offll.5Xtx2 20 50.0 0.3-3.5 520 167.000 t3,000 JI 68 2,890 1.0 tR0tXll.5ltlx2 20 50.0 0.08-1.3 520 1o,000 r3,000 49 80 6,660 L0 0tlSl.5flr3 20 75.0 0.3-3.5 7S0 201,000 ,000 32 80 2,890 1.2 0IIlt2.0tltx2 30 50.0

SMC Pneumatic Clean Series

45, 60, 75, 100, 125, 150, 175, 200 Standard Non-lube Double acting Single rod 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

Plate Cylinder

20 12 14 16 20 20 30 314 265 216 166 117 68 491 OUT 15 42 521 440 360 280 199 119 804 OUT 24 Spring return 56 824 698 573 447 321 195 1257 OUT 30 76 1327 1131 935 738 542 346 1963 OUT 47 113 2069 1757 1446 1134 822 510 3117 OUT 61 30 235 197 159 121 83 46 378 IN 15 42 413 348 283 218 153 88 650 IN 24 Spring extend 56 683 578 472 366 261 155 1056 IN 30 76 1107 942 777 613 448 283 1649 IN

MU

5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75 Depth

3

0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min 300 to 6000 L/min 20 to 2000 L/min 20 to 200 L/min 600 to 12000 L/min 24

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

12 6 24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net Weight Part No. 20 CM20Z-PS 5g GR-L-005 25 CM25Z-PS 10g GR-L-010 32 CM32Z-PS 150g GR-L-150 40 CM40Z-PS 11 3-2-2. CQSY, CQ2Y Series When malfunction due to air leakage of a cylinder occur, please replace with the below seal kit. C a u t i o n For installation and removal, use an appropriate pair of pliers (tool for installing a C type retaining ring).

2/3 Port Valve

flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

EX510

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

CKZ2N

8.5 22 12.5 22 22 20 R27 R7 R27 22 NAAMS code K NAAMS code K Part no.

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16

Digital Flow Monitor

(increment of 1 sec.), 20 sec., 30 sec.

PSE550/300

DC () IN (1 to 5 V) ZSP ISA2 Analog output or auto shift input Gray 2 DC () Blue 1 20 2 m 20 IS ZSM With bracket A PF2 30 IF 20 46 Data 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

23 (30) (2, 4 port) SMC 126.5 (139.5) 108.5 (121.5) PE port 12 Y 50 (63) 38 (53) 5 3 38 (53) 32 (42) 1 23 (30) 1/8 14 port 10 30 (42) 30 (42) 3/8, 1/2, 3/4-2 port 3, 5 port 1/8 12 port 3/8, 1/2, 3/4-2 port 2, 4 port 3/8, 1/2, 3/4 1 port EVS7-8-FG-D-M0 EVS7-8-F G-D-M0 H J I 221.5 216.5 216.5 103 103 56 56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B

CC

Compact hydraulic cylinder conforming to JIS Series CHKDB Nominal pressure (MPa) Bore size (mm) Stroke (mm) Action Fluid Series CHKDB CHKGB 20 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Compact hydraulic cylinder Series CHKGB 25 RE A B Hydraulic fluid 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75 32 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid REC Light and compact alminum