IC circuit Solid state switch Reed switch 5 V A96V A96 Yes Grommet IC circuit Relay, PLC A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet
s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ 1.11-31 Series C95 Refer to P.5.3-17, 27, 37, 46, 54, 58 and 61 for details on auto switches.
wire Solid state auto switch Reed auto switch IC circuit 5 V, 12 V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No
2 0 2 0 25 25 1.5 1 1 L L 3 3 3 3 5 5 5 5 K K 2 LECP6 ( NPN NPN (mm) PNP PNP 10 LECP1 1 LECP1 ( 1 NPN NPN 1P 1P PNP PNP 4 4 10 (CR) AN LECPA ( AP AN LECPA 6 6 16 16 NPN NPN (FKM) K K 20 10 20 10 AP PNP PNP S S (m) 25 14 25 14 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B 3 3 3 3 15 15 F F C C 5 5 5 20 20 5 ( () R R S S 15 - / P.42 7.3 (NPNPNP) J 2.2.3 16 - 1 2 3 4 + 5 + 6
cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5
IC circuit 5 V,12 V 12 V Relay, PLC Yes Yes Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V IC circuit A96V A96 5 V 12 V Grommet A93V A90V A93 A90 100 V Relay, PLC 2-wire 24 V IC circuit 100 V or less No Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches
Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.
IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.
Lead wire length (m) * Applicable Indicator light Load voltage Auto switch model Pre-wire Special function Type Wiring (Output) Electrical entry connector Perpendicular 0.5 (Nil) 3 (L) 5 (Z) None (N) DC AC load In-line 5 V 3-wire (NPN) A76H IC circuit Reed switch Solid state switch 200 V Grommet A72 A72H Yes Yes 100 V A73 A73H Relay, 12 V 2-wire 24 V Connector A73C PLC Diagnostic indicator
MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise
8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5
ES: Analogue output: Select 1 to 5 V or 0 to 10 V Output impedance: 1 k FS: Analogue output 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 PNP (1 output) + External input type PF3A7H--ES/FSMaximum load current: 80 mA Internal voltage drop 2 V max. External input: Input voltage of 0.4 V max.
10 m LAT3F 1.25 m Moving magnetic type linear motor Linear guide with circulating balls 17.6 oz (500 g) 100 m 30 m 90 m LAT3 Structure and Working Principle Permanent magnet The permanent magnet is mounted on the bottom side of the table, and the coil is mounted on the top surface of the rail.
D-A9V/M9V/M9WV/D-M9A(V)L types cannot be mounted. Do not indicate suffix N for no lead wire on D-A3/A44/G39/K39 models. Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN -X Individual -X Since there are other applicable auto switches than listed, refer to page 1214 for details.
Note AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 1.5 m 3 m 5 m Conductor resistance /km, 20C 65 or less Cable 25 cores x 24AWG Withstand pressure V, 1 min, AC 1000 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.
Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British
amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.
The voltage drop will vary with load current, and ideally should be 0 V. Internal voltage drop K Key-lock function A function that locks the set buttons so that no accidental setting changes can be made. -12No.PF-OMP0002-H Terminology Definition M The resolution of set and display values.
U Q F I 22 M E Z D 11 Minimum bending radius for lead wire 10 Auto switch D-A7, A8 K L B + Stroke M E S A + Stroke J 2-cushion needle Rod end male threads H1 C1 L1 X Rod end nut Auto switch D-A9, F9 Rod end male threads mm Bore size (mm) X C1 H1 L1 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Standard type mm A B C D E F H I J K L M N Bore size (mm) 32
Back flow mechanism Nil K Without back flow mechanism With back flow mechanism Thread type Nil N F Rc NPT G Optional specifications Port size Applicable model AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) AR20(K) to 60(K) Symbol 1 Note 2) N R Y Z Note 3) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Body size Port size