Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

Electro-Pneumatic Proportional Valve Series VEF/VEP

(Refer to the flow characteristics.) 1 (P) 2 (A) 3 (R) Current A Current A Choked flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) F1 solenoid F2 spring Flow Characteristics: 2 Port Controlled opening 1 (P) 2 (A) 3 (R) Spool Effective area (mm2) 1 (P) 2 (A) 3 (R) Sleeve Current A Current A Choked

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 F 2 R A1 R Photo micro switch Series Without switch/mounting rail Nil 6 8 1 2 3 4 5 6 NPN 1pc.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

CKZ2N

N O P Q 85.0 R 84.0 Part no.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

Vacuum Pad: Ball Joint Type

, 710 P.711, 712 P.713 to 717 P.713 to 717 P.718, 719 P.720 to 723 Buffer stroke Adsorption is possible even on a slanted surface.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

LEH_C

/LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) 4) /P.50 8.3 5) () /P.53 8.3 6) /P.39 6. 7) 8) () 0 /P.28,30 9) () /P.28,30 () 10) /P.28,30 INC/ () 29 - No. 2 / 1)() () () 2)IN* 15ms( No.

IDX-OM-W028

Interrupter EDV Electronic Drain Valve IDU Series 6-4 Electrical Circuit 6 4 IDX-OM-W028 Air Dryer 6 References IDU22E, 37E-30 IDU55E-30 GFCI R GFCI For option R For option R R TB TB PRR PRR PRR MC1 THS MC1 CM MC1 CM FM1 FM2 For option M MC2 FM2 MC2 PRS FM1 P P P For option M IDU75E-30 SYMBOL DESCRIPTION CM Refrigerating Compressor GFCI For Option R FM1 Fan Motor For Condenser FM2 Fan Motor

Manifold Specifications

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Guide Cylinder/Compact Type Series MGC

MGJ Front mounting flange MGP MGQ 2 x P (Rc, NPT, G) MGG MGC MGF MGZ R Y + Stroke MGT (mm) R Y P Bore size (mm) 20 25 32 40 50 1/8 14 88 1/8 14 88 1/8 14 90 1/8 15 101 1/4 16 116 D-X Individual -X 395 Series MGC Slide Bearing Allowable End Load and Deflection F Y MGCM 20-R MGCM 25-R MGCM 32-R Stroke Stroke Stroke (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y

AZ1000

r e Pressure gauge unit 2) 1) Refer to gauge guide (P.94) for gauge specifications. w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AZ1001S e q FV4 FV4 FV4 w FV4 FV4 FV4 r 2PW 3PW 4PW 2PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.