Series CJ5-S ø10, ø16 Stainless Steel Cylinder Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 12 + 0.2 0 0.1 0.3 NX A1 U1 L1 7 12 Material: Stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Part no.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
(kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 MXH W Mp Mr W MXU W My L3 A6 W L1 A2 L2 A4 MXS W Mey Mep MXQ Note) There is no need to consider this load factor in the case of using perpendicularly in a vertical position.
Allowable load mass on guides/Allowable moment w 3 Table 4.
AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.
Hs B A W 16, 20, 25 Approx. Hs W A A B CUJ CU 32 to 100 Approx.
Heat Exchanger Specifications HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 Heat exchanger model Cooling capacity (Water) Note 1) 500 W 300 W 750 W Heating capacity (Water) Note 1) 1000 W 600 W 1800 W Cooling/Heating method Peltier device (Thermoelectric device, Thermo-module) Radiating method Water-cooled Operating temperature range 50 to 140F (10 to 60C) (depending
How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !
Material Aluminum die-casted q Description Piston plate Body O-ring NBR 13 x 11 x 1 Common with Series VZ 000 1 5 Black Resin Resin w e i Piston Spool valve r Aluminum, HNBR t Resin End cover y Stainless steel Spool spring 3-3-20 5 Port Solenoid Valve Body Ported Series VZ3000 2 Position Single VZ3120 Grommet (G), (H) VZ3120-M5 Mounting hole for manifold G H VK Manual override (Non-locking
x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8 1 4 4 3.4 105 3 6.5 depth 3.4 RB0805X552 CY1F25 CY1F25 +0.012 0 -X Rc 1/8 1 5 7.5 5.5 140 NPT 1/8 G 1/8 5 9.5 depth 5.4 RB1006X552 Note 1) When adjusting the stroke, keep the T
As a rule when W + Pa>PA adjust P so that W + Pa = PA. (2) Installing a regulator with check valve at position (b) can decrease lurching during descent and actuation delay during ascent. As a rule adjust P so that W + PA = Pa.
5 SUP side passage OUT side passage SUP side passage OUT side passage SUP side passage OUT side passage ARJ Setting knob AR425 to 935 q Diaphragm (A) q AMR Steel ball Bleed q w Nozzle Bleed !2 !3 !1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !
Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.
74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16 20 25 22 56 2 5 36 40 5 50 M4 x 0.7 7 12 25 62 38 42 7 54 M5 x 0.8 8 13 2.5 5.5 30 72 46 52 10 64 M5 x 0.8 8 13 2 4 38 86 56 62 10 76 M6 x 1.0 9 14 2 2 MGQM (Slide
T unit Can be connected with PLC I/O card for serial transmission.
1 t e y !7 !6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.
F O.F. 5 07 tbs. {2.3 t\ol T T . 90" 5 7 4 (145 9) 452 1 1 4 9 ) t t 8 t30l 1 2 2 {3t } 0 0 6 (1 s) l 1 ?
0 o w !0 o AS-F AS-F w !0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.
Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.