IIIIIII

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

Mechanical Valves Series NVM, NVFM, NVZNI

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s R, Rc, NPT, G)> VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Guide Cylinder Series MGG

M N HR Bracket (Refer to the table below.) 4 x O 2 x P (Rc, NPT, G) Q T B E S W U K L R I AA X AB AP AL A Y + Stroke J V Z + Stroke Non-lock type Lock type 8 x AF AC AD AE Rod end lock Q R Y + Stroke Head end lock Dimensions not marked with an are the same as standard.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

type Nil S n 2 pcs. 1 pc. n pcs.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

Rotary Cylinder Series MRQ Size: 32, 40 1

energy 23 mJ 28 mJ Port size Rc 1/8, M5 x 0.8 (The port is plugged for delivery.)

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Digital Gap Checker ( compatible)

5 R/W Wind mode hysteresis S16 200 Y 0 ~ 1200 Setting of OUT1 hysteresis (window comparator hysteresis) 6 R/W ON delay time U16 0 Y 0 ~ 6000 Setting of OUT1 delay time at ON 0.01 s increment (0 to 60 s) 7 R/W OFF delay time U16 0 Y 0 ~ 6000 Setting of OUT1 delay time at OFF 0.01 s increment (0 to 60 s) Output mode U8 0 Y 0: HYS 1: Wind Setting of OUT2 output mode 1 R/W 1430 0X0596 0: Normal

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Compact Cylinder

D C Example) Bolt M5 x 45L: 4 pcs.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

High Vacuum L Type Valve

K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6

MLGC

Built-in magnet for auto switches is provided in all models. 9-4-1 2 Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 How to Order MLGC B R E S 32 100 H7BW L Number of auto switches Guide cylinder (Compact style with fine lock) 2 pcs. 1 pc. n pcs.

MLGC

Built-in magnet for auto switches is provided in all models. 9-4-1 2 Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 How to Order MLGC B R E S 32 100 H7BW L Number of auto switches Guide cylinder (Compact style with fine lock) 2 pcs. 1 pc. n pcs.

IR1000/2000/3000

SMC 50 35 5 SMC 6 28 (R) P P K U K C S U O C H L S O H L 38 AV AU Panel cut Panel thickness: Max. 4 Panel cut Panel thickness: Max. 3 34 AF 40 15.4 x 5.4 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR 8 x 6.5 79 13 45.5 VEX Atmosphere 106 G SET SET Pad side

CLQ

port VH Q 2 x 2-9 counterbore depth 7 H thread effective depth C 5.5 2-5.4 through M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 K M E S 3.2 2 x 2-M5 x 0.8 3.2 Head side cylinder port

Compact Hydraulic Cylinder

Bore size (mm) 20 32 40 50 63 80 100 M5 x 0.8 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M10 x 1.5 2 4 4 4 4 4 4 3 3 3 6 11.5 24 34 7. Do not use two cylinders facing one another horizontally or vertically in such a way that their piston rods strike each other. 8.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Fixed Throttle (No needle function) 4 X250 How to Order AS 2 2 0 1F 01 06 S 1 X250 Option Body size 1 2 M3, M5 standard 1/8, 1/4 standard Nil S None With seal M3 and M5 are not available with seals. Elbow Applicable tubing O.D.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.