XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Series KP/KPQ/KPG

M5 size standardized P Resin parts are P.P.

Series KP/KPQ/KPG

M5 size standardized P Resin parts are P.P.

Intrinsically Safe Valve

x 0.8 (Pilot EXH port) Manual override 17.6 109.7 33.7 EA P EB PE X A A A A 24 23.6 20 20 65.4 5.3 20 29 7.3 68 39 B B B B 6 x 1/4" {P(1), EA(5), EB(3) port} 46.3 M5 x 0.8 (External pilot port) (Pitch) P = 17.5 21 L1 L2 5 Stations 1 n 2 47.5 53 38 27.3 8.5 9.8 2n x 1/4" {A(4), B(2) port} (Pitch) P = 17.5 19 L (Lead wire length) L-type plug connector

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

VK3000

Applicable blanking plate assembly VK3000-7-1A 01 1 station Solenoid on opposite side of A and B port P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Nil R port: Rc 1/8 Thread type Type S41 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 P port: Rc 1/8 R port: Rc 1/8 S Nil Rc Port size Q CE-compliant Nil CE-compliant F N T G M5 M5 x 0.8 C4 4 cassette NPT B port

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

M5: 5.7) 35 5.5 53 (For top ported) Cover dia. 1.6 Cross section 0.34 mm2 39.5 7.8 42.5 P R 1 3 15 8 2-M5 x 0.8 PE port 13.4 2-Rc 1/8 Port 3(R) 16.3 41.2 2-Rc 1/8 1(P) port 46.5 The broken lines indicate the DIN rail mounting style [-D].

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

SMC Pneumatic Clean Series

style (G) / CBM2G, CBM2G Relief port M5 x 0.8 24 H2 DL Width across flats B1 2-P (Rc, NPT, G) Standard port Width across flats B2 H1 C2 NN HC Eh8 D I B G N F 1.5 Relief port M5 x 0.8 MM G N A K AL Width across flats NA 2-FD (This drawing shows the cases of 20 and 25.)

Piping: ø1/4" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø6 One-touch Fitting, Straight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: NPT 1/8, M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: ø1/4" One-touch Fitting, Staight Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -

Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -

Model: 0 to -101kPa, Piping: ø4, ø5/32" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -