Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Bracket A, Vertical Mounting, Option 3: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Prevents Micro-Bubbles

A R P PFA PPS PTFE C LVQ Thread type 4 Symbol Nil N Thread type Rc NPT LQ N.C.

Plug-in Unit

Connector: Input no. 0, 2, 4, 6 Input no. 1, 3, 5, 7 SW + SIGNAL -n + 1 SW SIGNAL -n PE 1 2 3 4 5 1 2 3 4 5 Description No. Function Drain 1 Drain/Shield 3 2 V + (+) Circuit power supply 2 5 Caution () Circuit power supply V 3 When IP65 or equivalent enclosures are required, install a waterproof cover on the input connector that is not being used. Order waterproof covers separately.

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

One-touch Fittings

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

1

Note 5) No cushion is equipped for N type.

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Bracket A, Vertical Mounting, Option 3: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

IDX-OM-W023

FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2 1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC OLR

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 2 3 08 D0 N ( 00T) D For P, R port inch sizes Kit designation Plug-in Series VQ2000 1 2 4 3 Option 4 Nil Electrical entry/Cable length Stations 1 2 Note 2) 01 Kit designation Entry direction Standard stations Kit, Cable length 1 station None Specifies DIN rail length Note 2) 02 to 24 B K N R S With back pressure check valve on all stations Special wiring specifications

VCL

OUT(2) 1 Thread type Rc NPT G Nil N F IN(1) Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Port size Class 3 Port size 1/8 (6A) 1/4 (8A) Class 2 Class 4 Symbol 01 02 03 04 06 3/8 (10A) 1/2 (15A) Class B in AC has a rectifying circuit built-in. Class H is AC only. No rectifying circuit.

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.