SMC Corporation of America
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In locations where high frequency occurs 13. In locations where damage is likely to occur due to lightning 14.

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

No.EX-OMZ0024 PRODUCT NAME Fieldbus system EtherNet/IP compatible SI Unit MODEL / Series / Product Number EX600-SEN7/SEN8 EX600-ED# Table of Contents Safety Instructions 4 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

No.EX-OMW0016-A PRODUCT NAME SI unit ( device) MODEL / Series / Product Number EX260-SIL1 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Summary of product function 10 Installation and Wiring 11 Installation 11 Wiring 12 LED Indication, Settings and State Monitoring 13 LED indication 13 Switch setting (Process data size / Data transmission

Double clevis: Clevis pin, Type C retaining ring for axis, Body mounting bolt. -13- 3.

14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5

Body tapped H l Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Model Bolt D 5H9 + 0.030 depth 4.5 2.1 6 MXW8 M4 x 0.7 0 5H9 + 0.030 depth 4.5 6 2.1 MXW12 M4 x 0.7 0 Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Bolt Model 6H9 + 0.030 depth 5.5 9 4.4 MXW16 M5 x 0.8 0 6H9 + 0.030 depth 5.5 5H9 + 0.030 depth 4.5 13 4.4

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

I NA D J A F N2 N1 MM S + Stroke F H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc 1/8 13 NPT 1/8 25 G 1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc 1/8 13

Without rod end thread 3 41.5 34.5 27.5 3 32.5 25.5 18.5 9 M10 x 1.0 R B 5 46 39 32.5 4 34 27 20.5 13 M15 x 1.5 Rod end nut Refer to page 35. 6 50 43.5 37.5 5 36 29.5 23.5 20 M22 x 1.5 13 (12) Dimensions: Embedded Type CJPS4 Exhaust port NN MM 0.4 C0.3 Gd9 C Q K W H R (mm) E F A H S Z B B C E G H K F Bore size (mm) 4 6 10 15 MM A 5st 10st 15st 3.5 7.5 6.5 6 11.5 10 6 10 18 26 M2 x 0.4 CJPS6

Rod bumper 11 Polyurethane Axial Piping Type Plate 12 Stainless steel DPlug 13 Note Description No.