SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

AZ1000

q w q AZ1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

SX

A, B port location 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations SZ W = 19n + 45 W = 43n + 77 W = 51n + 81 Applicable flat ribbon

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

Air Slide Table

A C B A C B A stroke operation 1) Initial state (0 stroke position) W W A stroke B stroke A stroke 2) Operation When the air pressure is supplied from the A port, the rod operates the A stroke. A Precautions C B A stroke Caution 1. Do not supply air until the cylinder is fixed with the attached bolt. 2.

CLA

:::h i=ch 40 50 80 63 100 ! ~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 24 10.5 24 10.5 A B 10.5 10.5 5.1 9.5 26 1 6 NN-M6 X 1 thread 12 deep A B 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 Cross section AA Cross section BB HA GA (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10

Modular Type Lubricators Series AL

Check the dripping amount once a day. Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

TABLE OF CONTENTS

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

LEC-OM02704CN

(1) 055() 0+40() -20+65() -15+70() 90RH() 80RH() 90RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) EMG ON(Ryn0)OFF ALM MBR (RYn0)OFF(ALM) (MBR) (EMG) EMG RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3)

Magnetically Coupled Rodless Cylinder

HB HT HC N X A W K 2-plug H HA CB T 4-counter bore dia.

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CL

27 30 31 37 40 35 35 39 36 45 45 60 60 75 75 75 84 90 98 116 126 98 98 106 16.5 16.0 16.0 18.0 18.0 40 40 40 8 0 0 0 0 59 66 66 80 81 133 133 141 223 245 262 305 324 399.5 408 444.5 9-3-7 40 Series CL1 Axial Foot Style (L) 40 to 100 Lock-up at piston forward Lock-up at piston backward A B Rc BP lock-up port Unlocked when pressurized Rc BP lock-up port Unlocked when pressurized B A S

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 DA 30 MM MM DA 30 DA 30 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 84 Simple Specials Series CP96/C96 Symbol Change of Trunnion Bracket Mounting Position 2 -XC14 Series C85 Series

Lightweight and Compact

fluid temperature [C] Pump Capacity HRS090-A-20/40 HRS090-W-20/40 0.5 50 Usable range (50 Hz) Circulating fluid pressure [MPa] Circulating fluid outlet (60 Hz) 0.4 40 Pump head [m] 0.3 30 Circulating fluid outlet (50 Hz) 0.2 20 Usable range (60 Hz) 0.1 10 Circulating fluid return port 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow rate [L/min] 78 Thermo-chiller Standard Type HRS090 Series

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

HB HT HC N X A W K 2-plug H HA CB T 4-counter bore dia.