HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Type Insert pin (single) Insert pin material (J/K type only) Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

Series IDG

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Mechanical Valves Series NVM, NVFM, NVZNI

F . 2 20 lbs. (1 ks.)

IIIIIII

F . 2 20 lbs. (1 ks.)

Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

Rotary Table

Shock absorber External shock absorber With adjustment bolt 0.007[J] 0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J

10

x J K B C CM3 CG1 CG3 Positional relationship between port and cushion valve JMB Port MB MB MB1 CA2 Cushion valve CS1 CS2 [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA KB 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 12.2 10 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14.2 14 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 19 18 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

/4 200 204 265 132 320 18.5 M18 x 1.5 M40 x 1.5 63 60 162 45 20 41 115 70 39 48 17 24 25 Up to 1200 3/4 1 225 226 280 150 335 18.5 M20 x 1.5 M45 x 1.5 63 182 20 60 50 46 115 39 74 48 17 24 25 Lube Non-lube Up to 1200 Data 275 277 355 180 420 23 M24 x 1.5 M56 x 2 71 225 25 67 60 140 56 49 86 60 20 29 30 Up to 1200 330 330 400 212 475 23 M30 x 1.5 M64 x 2 1 80 270 30 76 70 65 140 49 96 60 20

IDG

Size 3 10 20 30 50 5 Drain discharge Nil Manual valve C N.C. auto-drain D N.O. auto-drain Drain guide (Aperture 1/4, without valve) J Port size Note) IDG50M and 50HM are 03 only.

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

V

T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3 1.8 25 ZPR16 U C 16 18 12.5 21.5 30.4 46.5 20 67.5 72 3.5 1.2 25 D E E P T Y P E I: M6X1 I: M5X0.8 Model A B C D E F Y G H H G ZPR10D 10 12 15 24 32.9 49 20 70 75 6 25 ZPR16D 16 18 16 25 33.9 50 20 71 76 7 25

CNG

200 201 to 350 44.5 8 201 to 350 6.5 9 20 to 300 22 19.5 17 45 103 1/8 16.5 10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J

Cylinder with Lock Series CNG

200 201 to 350 44.5 8 201 to 350 6.5 9 20 to 300 22 19.5 17 45 103 1/8 16.5 10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

53

time 1 min 30 s 20 s Max.

Cylinder

(mm) F F' GA I GS H J 5 ,~t' , 10st I 1&$\ 49'S\ ;p~" K I MM NN 8 I M3XO .5 MlOX 1.0 7 30.5 35.5 40.5 45.5 6 7 9 14 ,4 3 8 6.5 6 6 17 6 I 8 ;lOS 35.5 40.5 4!to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !