Cylinder

-I ~ ime-sions~m ~-~~~--~-Nose mount: CO JPB u \2~ . c: n p w , ,," B' p I./l,ao~ hab ,/ (' B Rod end without thread w ",. /"(2 " .' ,," / ro~ ~ e ~With , autO sw.itCh Bore size w i (mm) 15S): 20~t ; .

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Heavy Duty Stopper Cylinder

FT GA 2 x P D QA Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) 2 x P QB W WB E GB A (mm) Circumscribed circle O QA Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 26 9 14 depth 5 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 31 11 18

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

HRX-OM-O021

[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig. 9-6 Heating capacity(HRS050-W-20

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

(Light ON) One auto switch One position, any of q, w Detection combinations and e can be detected. Two auto switches Two positions of A Pattern B q, w and e can C be detected. Step 1) Fully close the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

AC Servo Motor Driver (SSCNET /H Type)

Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Pin Clamp Cylinders

6.5 20 13 8.5 20 18 13 27 4 4 5 5.5 11.6 6 7.5 16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 13.5 195 19.6 196 19.7 197 19.8 198 19.9 199 20.0 200 19.5 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 D11 7.5 20 15

Multi-Axis Step Motor Controller

Connector A B1 (Terminal no.) 1 2 5 6 B 15*1 A1 (14) (18) (17.7) (10.2) C 20*1 A6 B1 B3 A1 A3 B6 (13.5) *1 Produced upon receipt of order (Robotic cable only) 1 2 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) With lock and sensor Signal Connector A terminal no. A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa Holding force (N) Holding force (N) 0.4MPa 20 20 0.4MPa MHZ2 0.3MPa 0.3MPa MHZJ2 10 10 0.2MPa 0.2MPa MHQ MHL2 0 10 20 30 40 50 0 10 20 30 40 50 L: Holding point length mm Holding point L (mm) Holding point L (mm) MHR MHR2-20/MDHR2-20 MHR2-20/MDHR2-20 MHK Indication of effective holding force The holding force shown in the tables represents the holding force of one finger when all

Series PF2W Digital Flow Switch For Water

min) Flow rate (L/min) Flow rate (L/min) PF2W711, 511 0.035 0.030 0.025 Pressure loss (MPa) 0.020 0.015 0.010 0.005 0 10 20 30 40 50 60 70 80 90 110 100 Flow rate (L/min) Wetted Parts Construction/Sensor Unit w w r q e Parts list No. 1 2 3 4 Description Material Stainless steel NBR PPS PPS Attachment Seal Body Sensor Flow direction 306 Series PF2W For Water Digital Flow Switch Dimensions:

SMC Electronic Switch Series Variations

ZS-20-A 16 NPN Open Collector 2 output w/o analog output, 3 revolution adjustment ISl IWith lead wire ZS-20-5A 17 NPN Open Collector 2 output w/o analog output, 200 revolution adjustment Note) When ordering switch with 5m long lead wire, indicate both part numbers. Ex.) ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

HEC_W-E

Cooling capacity W 2000 Fluid: Water 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-5 Cooling capacity of HEC012 2) Heating capacity Radiating Water Temp.20 oC Radiating Water flowrate10L/min 3000 2500 Heating capacity W Fluid: Water 2000 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-

Cylinder with Lock Series CNG

seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion ring gasket B NBR 59 C type snap ring for unlocking cam

Compact Type

32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !