Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Refrigerated Air Dryers

air temperature [C] 55 Symbol Ambient temperature [C] 32 Outlet air pressure dew point [C] 10 Refrigerated air dryer Power supply voltage (Frequency) *5 Single-phase: 100 VAC (50 Hz), 100/110 VAC (60 Hz) *5 Single-phase: 200 VAC (50 Hz), 200/220 VAC (60 Hz) Single-phase: 230 VAC 10% (50 Hz) Auto drain Single-phase 100 V 180/202 208/236 385/440 *7 250/290 *7 425/470 *7 460/530 Single-phase

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

VXH

2 VX3 ) VXA How to Order VN VXH2230 02 1 G LVC LVA Bracket Nil B 3 -B JIS Symbol LVH LVD Valve/Body 0 3 ' +0 Electrical option Nil 3 LVQ S ( L LQ Z + ( Port size 6 ( 2 (-' LVN 02 03 04 6 +" 6 &+$ 6 +! TI/ TIL Electrical entry G 8 PA Rated voltage C ) 2 ! >) +# = 1 >) +# = D 543 PAX T ) 3 >) +# = 6 ( 4 !! >) +# = PB 7 !"

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Electro-pneumatic Proportional Valve Series VEF/VEP 1

7 !8 !

Compact Manifold Regulator

PVQ VY1 7.

Shock Absorbers and Rate Controls

l llunbcr llodel (Rell B C .05 t) t t G Eolt Slts w?isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

Series VQ Metal Seal/Rubber Seal Body Ported

SOL.A SOL.A { { { { { { { { 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( + ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( + ) 1 station 5 stations SOL.B SOL.B SOL.A SOL.A 2 stations 6 stations SOL.B SOL.B SOL.A SOL.A 3 stations 7 stations SOL.B SOL.B SOL.A SOL.B SOL.A SOL.B 4 stations 8 stations VV5Q14 COM. COM.

Table of Contents

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

CE

d H B C D Part no.

CE

258-9200-www.stevenengineering.com 2-N through 4-O thread depth R Metal connector 500 or 3000 M14 x 1 B + Stroke A + Stroke A B C D E G H I K L M Bore size (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

VH Series, 4 Way Hand Valve

8 1 (P) 4 (B) 2 (A) 3 (R) 2 VH300/400 5 6 4 3 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component parts Material VH200 300 400 Zinc die-casting Aluminum die-casting Description No. / / VH600 Cast iron Cast iron 1 2 Cover Body / Spare parts Seals kit Part No.

RQ

Refer to page 7-7-14 for details on rod end nut and accessories. Double clevis bracket material: Carbon steel 7-7-9 9 Series RQ Dimensions: 32, 40, 50 For the auto switch mounting position and its mounting height, refer to page 7-7-16.