CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

Table of Contents

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

CJ2

, 45, 60 6 10 16 3.72 1.77 10 15, 30, 45, 60 CS1 6.86 3.53 Precautions 16 15, 30, 45, 60, 75, 100, 125, 150 14.2 6.86 Minimum Strokes for Auto Switch Mounting Be sure to read before handling.

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

CM2

14 24 8 M8 X 1.25 24 25 13 8 41 20 20 33.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 10 30 25 13 8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to

High Purity Fluoropolymer

3/8" 6 30 21 33.1 28 11 22 30 (M) N 28.5 1/2" 10 19 12 19 35 1/2" LQ2R52-M H 7 42.5 46 40 32 14 28 36 LQ2R54-M LQ2R53-M Class 4, 5 33.5 3/4" 12 Inch sizes Connection threads R/NPT Model Applicable tubing O.D.

MTS

30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5 102.5 102.5 102.5 28 28 32.5 52.5 98.5 48.5 98.5 48.5 40 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

C95

RT T V VA VB 4 4 5 9 11.5 17 164 182 195 224 259 289 260 290 333 362 431 471 6 6.5 8 8 10 10 37 41.5 47.5 55 61 68 4 4 5 5 5 5 4 4 6 6 8 8 4 4 4 4 4 4 17 19 24 24 30 30 6.5 9 10.5 12 14 15 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 13 14 15.5 16.5 19 19 6.5 8 9 8.5 10.5 10.5 32 40 50 63 80 100 26 30 37 37 46 51 34 39.5 47 55.5 61.5 69.5 15 17 24 24 30 32 10 13 16 16 21

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

100 30 4 40 Load weight (kg) Load weight (kg) Shock absorber 63 Horizontal collision: P = 0.5 MPa 2.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

100 30 4 40 Load weight (kg) Load weight (kg) Shock absorber 63 Horizontal collision: P = 0.5 MPa 2.

MY1

(Assuming approximately 30% dispersion.) It may vary substantially depending on an ambient environment.

RQ

Example) RQA 20-30 does not exist.

VFS

For 30 type, common external pilot (on manifold side).

IIIIIII

Cam Lever(-01) 30" 2.29o.71 45. 0.98 (0.3) ffiffiffi CHANGING PUSH BUTTONS One-WayCam Lever(-02) 30" 2 29(O.71 45" 0.98 (0.3) Plunqer(-05) 0.65 (0.2) Roller Plunoer. Inllne {{6) 30' 0.98 (0.3) Roller Plunoer.

Rotary Table

Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.

%silltr

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?

Compact

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

99

50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min)