Ozone Resistant

5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ AS Speed controller SY SYJ Regulator AR Pressure control valves Filter

AC20-A to AC40-A

Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1

FH34/44/54/64

KA00612M Relief valve FH441 20 to 24 (P85) (P85) (G145) Element KA00713 KA00104 KA01296M FH340 03 to 04 Differential pressure indicator (P22A) (P30) (G80) Case KA00720 KA00107 KA02476 FH34 06 to 08 (P32) (P44) (G105) KA00631M KA00102 KA00104 KA01759 FH44 to 64 03 to 04 (P20) (P30) (G65) w O-ring KA00720 Phosphoric FH44 to 64 06 to 08 FKM-70 FKM-90 KA00107 KA02477 Drain plug (P32) ester KA00722

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

HRX-OM-I051

P1 (D-sub 25P female) Cap P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-10 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) M-5ALN-4 M-5ALU-3, -4 C D M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 1.4 2.4 1.1 1.4 2.4 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M-5ALN-6 M-5ALU-6 Barb elbow for nylon tube: M-5ALHN-4, -6 Barb elbow for soft tube: M-5ALHU-3, -4, -6 C D Part No.

Applicable manifolds include serial transmission types, D-sub connectors, flat ribbon cable, PC wiring system compatible, flat ribbon cable, terminal block, lead wire, and circular connectors.

ATX-OM-F003E

Product part number Auto drain number Normally closed Normally open HAW2-04C/D AD402-04C-6-A AD402-04D-6-A HAW7-06D AD402-04D-6-A HAW22/37-14D AD600-06 HAW55/75-20D AD600-06 HAW110-30D AD600-10 2) The drain piping, if conducted, should have an inside diameter of at least 10mm and a maximum length of 5m.

HRX-OM-X010

P2 (D-sub 9P female) Serial RS-485 communication cable P1 (D-sub 25P female) Contact signal cable Figure 3-12 Signal line mounting 3.3 Procedure for Installation HRZ Series 3-14 HRX-OM-X010 Chapter 3 Transporting and Installation 3.3.6 Installation of circulating fluid and facility water piping Regarding the circulating fluid and facility water pipings, consider carefully the suitability

SYJ Series

DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 Type D DIN connectors have the N indication at the end of rated voltage symbol. (For DIN connectors without lights, N is not indicated. Please refer to the name plate to distinguish.) AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 Dimensions are the same as type D DIN connector.

HRX-OM-K003

Cap P1 (D-sub 25P female) P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-7 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.

NVEPA|VEFseies

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

ZL3-OM00801

0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

AS-FG

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG

Series H, DL, L, LL Self-align Fittings

L D 4 6 DP-04 DP-06 5.6 7.6 0.2 0.5 8 DP-08 8 9.6 0.8 10 DP-10 11.6 1.2 12 DP-12 13.6 1.6 Swivel elbow: L Effective orifice (mm2) Applicable tube O.D. (mm) Thread R(PT) H1 (Hex.) H2 (Hex.) H3 (Hex.) H4 (Hex.) Weight (g) Part No.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the