MU

25 10 S M MDU B 25 10 S M A73 S With auto switch Built-in magnet Number of auto switches Mounting S n 2 1 n B L F G C D Basic Axial foot Front flange Rear flange Single clevis Double clevis Without auto switch(built-in magnet) Auto Switch Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

LEC-T1_C

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 5 - LEC-T1 Series/ / 3) *3) 1 1 1.5 1 () 6 - TB Ver.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

Series CE1

OUT OUT Proper Auto Switch Mounting Positions (Stroke End) Proper Auto Switch Mounting Positions(Series CE1) Auto switch (mm) Bore size (mm) Auto switch model Symbol 20 32 40 50 63 12 A B A B A B A B A B A B A B A B A B 40.5 47 55 79 82 85.5 D-A7, A8 4 13 17 39 44 41.5 41 47.5 55.5 79.5 82.5 86 D-A7lH, A80H, A73C, A80C, D-F7l, J79, F7lV, J79C 4.5 13.5 17.5 39.5 44.5 42 A B 38 44.5 52.5 76.5

Precision Regulator

2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

5 Port Solenoid Valve Series SQ1000/2000

) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5 232 262.5 273 10 227 249.5 275

Filter for Cleaning Solvent Quick Change Filter Series FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

MXF

Maximum Allowable Load Weight: Wmax (kg) 50 100 200 300 500 700 Average speed Va (mm/s) Model 0.6 1 2 4 Maximum allowable load weight Moment center position distance compensation amount (Refer to Fig. (2).)

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

196 65 14 16 32 ZZ + Stroke LZ CJP Front flange(F)/Locking at head end (Hl) CJ2 Hl/ Rl/ Wl (mm) Cushion valve Stroke range Bore size (mm) CM2 Fd FZ FY FX FT FE FD B 4-FD Port 32 40 50 63 80 100 up to 700 25 79 32 64 10 3 7 50 C85 up to 800 31 90 36 72 10 3 9 55 up to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

CXWM/CXWL

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 2-M5 x 0.8 DCylinder port -X 20Data 2 x 2-M5 x 0.8 Thread depth 10 4-4.3 through 4-8 counterbore depth 4.5 2 x 2-5H7 depth 6 +0.012 0 2-RB0805-X552 Shock absorber (mm) Model F ZZ Z SS S Q P L CXWM16-50 CXWM16-75 CXWM16-100 CXWM16-125 CXWM16-150 CXWM16-175 CXWM16-200 188 152 100 52 164 30 63 35 238 202 125 77 214 60

V100

V114 V114A V124 Note 1) 0 to 0.7 0 to 0.7 0 to 0.7 0 to 0.7 100 kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area